In this thesis, we have designed and optimized strip waveguide based micro-ring and micro-ring and micro-racetrack resonators for biosensing applications. Silicon-On-Insulator (SOI) platform which offers several advantages over other materials such as Lithium Niobate, Silica on Silicon and Silicon nitride is considered here. High index contrast enables us to miniaturize the biosensor devices and monolithic integration of source and detectors on the same chip. We have considered the dispersive nature of the waveguide and proceeded towards optimization. Finite difference schemes and Finite Difference Time Domain (FDTD) methods are the primary tools used to model the biosensor. Various structures such as channel waveguides and beam structures are analyzed on the basis of their suitability for sensing applications. Strip and Rib waveguides are the two geometries considered in our studies. In an optical guiding structure, effective index of the propagating optical mode can be induced by two different phenomena: i. Homogeneous Sensing In this category, effective index of a propagating optical mode changes with uniformly distributed analytes extending over a distance well exceeding the evanescent field penetration depth. The sample serves as the waveguide cover. ii. Surface Sensing In the case of surface sensing, analytes bound to the surface of the waveguide. The effective index of an optical mode changes with the refractive index as well as the thickness of an adlayer. A thin layer of adsorbed or bound molecules transported from liquid or gaseous medium serving as waveguide cover is referred as an adlayer. Both homogeneous and surface sensing schemes are addresses in this work. By bulk sensing method, the characteristics of bioclad covering the device are studied. Optimization of the resonator structure involves the analysis of following parameters: • Gap between the ring and bus waveguides • Free spectral range • Extinction ratio • Quality factor We have achieved a maximum bulk sensitivity of 115 nm / RIU with ring waveguide width of 450 nm and bus width of 350 nm which is better than an earlier reported value of 70 nm/ RIU. We have proposed a novel detection scheme consisting of a micro-racetrack resonator formed over a cantilever structure. The devoice works on the principle of opto-mechanical coupling to detect conformational changes due to biomolecular adherence. BSA (Bovine Serum Albumin) and IgG ( Immuno Globulin G) are the two proteins considered in the work. Mechanical analysis of the beam for tensile and compressive stresses and corresponding spectral responses of the racetrack resonators are analyzed both by semi-analytical and method and numerical analyzes. We compared various aspects of rib and strip waveguide racetrack resonators. We have proved by numerical simulation, that the device is capable of distinguishing tensile and compressive stress. Two strip waveguides of dimensions : 450 nm X 220 nm and 400 nm X 180 nm, former supporting both Quasi-TE and Quasi-TM modes where as the second configuration allows only Quasi-TE mode alone. Sensitivity of the cantilever sensor is : 0.3196 x 10-3 nm/ µɛ at 1550 nm wavelength.

In this thesis, a miniaturized energy harvester system is developed. The energy harvester converts fluid kinetic energy into electrical energy without using any rotating components. The working principle of the energy harvester is based on the so called vortex-induced vibration. Such systems have the potential to provide energy for wireless sensor networks in the field of inline measurements for gas, oil or water transportation systems. The theoretical background of the vortex-induced vibration (VIV) is studied. Based on the studies, a fluid-structure interaction simulation is carried out to optimize the structure of the energy harvester. As result, the conversion efficiency is significantly improved, which is experimentally confirmed. A series of demonstrators are manufactured according to the simulation and optimization results. It is tested on a self-constructed test bench. To further improve the performance, an electromagnetic generator is proposed, and therefore, a multimethod demonstrator realized. The demonstrators are working in air flow already at a velocity of 2 m/s, and reach the maximum efficiency at 3.6 m/s. This performance ranks among the best published results and is discussed in detail. / In der vorliegenden Arbeit wird ein miniaturisiertes Energiegewinnungssystem entwickelt, das unter Verzicht auf rotierende Komponenten kinetische Strömungsenergie in elektrische Energie umwandelt. Die Funktion dieses Wandlers basiert auf der sogenannten wirbelinduzierten Vibration. Derartige Systeme besitzen unter anderem das Potenzial, drahtlose Sensornetzwerke zur Erfassung von Messdaten in Gas-, Öl- oder Wassertransportsystemen mit Energie zu versorgen zu können. In der Arbeit wird der theoretische Hintergrund der wirbelinduzierten Vibration untersucht und darauf basierend werden Fluid-Struktur-Wechselwirkungssimulationen zur Strukturoptimierung durchgeführt in deren Ergebnis eine theoretische Verbesserung der Effizienz des Wandlers um ein Mehrfaches erreicht wird, die auch praktisch bestätigt wird. Unter Berücksichtigung der Simulations- und Optimierungsergebnisse wurden eine Reihe von Demonstratoren gefertigt, die auf einem selbst konstruierten Prüfstand getestet wurden. Zur weiteren Erhöhung der Leistungsfähigkeit des Wandlers wird ein zusätzlicher elektromagnetischer Generator vorgeschlagen und damit ein Multi-Methoden-Demonstrator technisch realisiert. Die Demonstratoren arbeiten in strömender Luft bereits bei Geschwindigkeiten von 2 m/s und erreichen bei 3,6 m/s ihre maximale Effizienz. Die erreichten Ergebnisse ordnen sich im Vergleich mit denen aus entsprechenden Publikationen vorn ein und werden ausführlich diskutiert.

Ce travail de thèse a porté sur le développement de réseaux de micro- et nanocapteurs opto-électrochimiques pour la bioanalyse. Ils répondent à la demande grandissante dans le domaine de la recherche et du diagnostic pour des outils permettant de réaliser de multiples analyses simultanément avec des échantillons de faibles volumes. Ces nouvelles biopuces de haute densité sont fabriquées à partir de faisceaux cohérents de fibres optiques. Une des deux faces est micro- ou nanostructurée par une attaque chimique, puis fonctionnalisée avec une sonde biologique. La première biopuce est un réseau de nanocapteurs fluorescents à ADN où les sondes ont été immobilisées grâce aux propriétés d’électropolymérisation du pyrrole. La lecture est réalisée à distance au travers du faisceau d’imagerie. En combinant la technique d’immobilisation avec des microleviers électrochimiques, plusieurs sondes différentes ont pu être adressées sur le même réseau nanostructuré. La seconde biopuce permet d’effectuer des immunodosages multiplexés en utilisant l’imagerie électrochimiluminescente résolue à l’échelle d’une microsphère. Le développement de cette technique permet de combiner les avantages de l’électrochimiluminescence avec des immunodosages multiplexés. L’élaboration de ces réseaux allie différentes techniques physico-chimiques, notamment électrochimiques, pour obtenir des biopuces avec un fort potentiel, grâce à une densité et un degré de multiplexage importants. / This work presents the development of optoelectrochemical micro- and nanosensor arrays for bioanalytical applications. These platforms respond to the growing need in research and diagnostic for tools allowing multiple and simultaneous analysis in small-volume samples. These new high density biochips are made from coherent optical fiber bundles: one face is micro- or nanostructured by chemical etching and then functionnalized with biological probes. The first biochip is a fluorescent DNA nanosensor array where probes have been immobilized by electrodeposition of a polypyrrole thin film. The detection of the hybridization is remotely performed through the imaging fiber. Different probes were succesfully addressed onto the same nanostructured array thanks to electrochemical cantilevers. The second biochip allows multiplexed sandwich immunoassays using electrochimiluminescent imaging resolved at the single bead level. In particular, the development of this new readout mechanism allows extending electrochemiluminescent detection for multiplexed immunoassays. Design and implementations of both platforms take advantages of different physical and chemical techniques, especially electrochemical, to obtain biochips with a great potential through high density and high multiplexing level.

This mémoire presents my current research interests in micro and nano-mechanics in a comprehensive manuscript. Our experimental device is first presented: this atomic force microscope, designed and realized in the Laboratoire de Physique de l'ENS Lyon, is based on a quadrature phase differential interferometer. It features a very high resolution (down to 10 fm/rtHz) in the measurement of deflexion, down to low frequencies and on a huge input range. The dual output of the interferometer implies a specific handling to interface common scanning probe microscope controllers. We developed analog circuitries to tackle static (contact mode) and dynamic (tapping mode) operations, and we demonstrate their performance by imaging a simple calibration sample. As a first application, we used the high sensitivity of our interferometer to study the mechanical behavior of micro-cantilevers from their fluctuations. The keystone of the analysis is the Fluctuation-Dissipation Theorem (FDT), relating the thermal noise spectrum to the dissipative part of the response. We apply this strategy to confront Sader's model for viscous dissipation with measurements on raw silicon cantilevers in air, demonstrating an excellent agreement. When a gold coating is added, the thermal noise is strongly modified, presenting a 1/f like trend at low frequencies: we show that this behavior is due to a viscoelastic damping, and we provide a quantitative phenomenological model. We also characterize the mechanical properties of cantilevers (stiffness and Elastic Moduli) from a mapping of the thermal noise on their surface. This analysis validates the description of the system in term of its normal modes of oscillations in an Euler-Bernoulli framework for flexion and in Saint-Venant approach for torsion, but points toward a refined model for the dispersion relation of torsional modes. Finally, we present peeling experiments on a single wall carbon nanotube attached to the cantilever tip. It is pushed against a flat substrate, and we measure the quasi-static force as well as the dynamic stiffness using an analysis of the thermal noise during this process. The most striking feature of these two observables is a plateau curve for a large range of compression, the values of which are substrate dependent. We use the Elastica to describe the shape of the nanotube, and a simple energy of adhesion per unit length Ea to describe the interaction with the substrate. We analytically derive a complete description of the expected behavior in the limit of long nanotubes. The analysis of the experimental data within this simple framework naturally leads to every quantity of interest in the problem: the force plateau is a direct measurement of the energy of adhesion Ea for each substrate, and we easily determine the mechanical properties of the nanotube itself.

<p>Bonding techniques intended for assembling space microsystems are studied in this work. One of the largest problems in bonding pre-processed semiconductor wafers are the severe process restrictions imposed by material compatibility issues. Plasma processes have shown to be good for sensitive materials integration why the influence of different plasma parameters on the bondability of wafers is particularly studied. Conventional wet chemical and field-assisted methods are also examined. The resulting bond quality is assessed in terms of mechanical strength, homogeneity, and yield.</p><p>The effect of spaceflight environment on the reliability of wafer bonds is also investigated. Both high and low temperature annealed bonds are found to be very robust. Effects observed are that low temperature bonds are reinforced by thermal cycling in vacuum and that high temperature bonds degrade slightly by low dose γ irradiation.</p><p>Adhesion quantification is important for all bonding. Development of accurate quantification methods is considered necessary since most methods at hand are limited. This work includes the development of the blister test method. Former test structures are improved to be more practical to work with and to yield low experimental scatter. A physical stress model for the improved structure is suggested with which successful predictions of fracture for different test specimen configurations are made. The blister test method is used throughout this work to assess the strength of wafer bonds. The physics background and modelling of other common test methods are also thoroughly analysed. The methods’ practical capabilities and limitations are commented; origin and mitigation of measurement errors are discussed. It is shown that all methods can be significantly improved by small means.</p><p>Weibull statistics is introduced as a tool to characterise wafer bonds. This method is suitable to use in brittle materials design as the inherent variability in strength can be properly accounted for.</p>

The object of this thesis is to apply scanning probemicroscopy (SPM) to the field of advanced powder processing.Measurement of interparticle surface forces at conditionsrelevant to ceramic processing has been performed together withthorough studies of powder friction. Surface force measurements between silicon nitride andsilica surfaces in 1-bromonaphtalene and diiodomethane resultedin an attractive van der Waals force in both media for thesymmetric systems and a repulsive van der Waals force for theasymmetric systems. This agreed well with theoreticalpredictions from Lifshitz theory. Measurements in electrolytesolutions between silicon nitride surfaces with a varyingdegree of oxidation showed that silanol groups dominated theinteractions at a high degree of oxidation, whereas theinfluence of amine species became stronger after surfaceetching. Surface charge, surface potential and density ofsurface groups have been extracted from DLVO computer modellingof the experimental force curves. Surface force measurementshave been carried out using a nitrided silica sphere as acolloidal probe, representative for commercial silicon nitridepowders. Adsorption of poly(acrylic acid) above the isoelectricpoint generated a thin polymer layer of an essentially flatconformation. Friction force measurements were attainable via novelcalibration procedures of both the lateral photodetectorresponse and the cantilever torsional spring constant.Combining the method for detector calibration with evaluationof static friction slopes simplified the choice of appropriatecontact mechanics theory to evaluate the friction measurements.Applying the method on friction measurements between ironsurfaces coated with commercial lubricants showed a substantialsurface deformation not seen from the friction force alone. Thenanorheological properties of silica surfaces coated with twodifferent stearic acids have been evaluated from friction forcemeasurements. Steady sliding motion was replaced by highlyregular stick-slip motion at a critical load and velocity. Thestick-slip motion was successfully described and fitted to aphenomenological model. The contact area evaluated fromMaugis-Dugdale theory revealed the contact diameter to be veryclose to the stick-slip periodicity. Friction measurements were carried out between individualspray-dried ceramic granules as a function of binderconcentration and relative humidity. The hygroscopic nature ofthe binder resulted in a higher adhesion force but lowerfriction coefficient with increasing humidity. This effect wasascribed to softening of the binder and a lowering of the shearstrength of the binder rich surface layer on the granules.Comparison of the friction force between two granules and agranule and a hard metal surface confirmed that resistance toflow during the initial stages of powder pressing is dominatedby granule-wall friction and adhesion. Keywords: Atomic force microscope, AFM, SPM, van der Waalsinteraction, DLVO-theory, surface forces, colloidal probe,force curve, friction, adhesion, stick-slip, cantilever,calibration, spring constant, silicon nitride, iron,silica.

Bonding techniques intended for assembling space microsystems are studied in this work. One of the largest problems in bonding pre-processed semiconductor wafers are the severe process restrictions imposed by material compatibility issues. Plasma processes have shown to be good for sensitive materials integration why the influence of different plasma parameters on the bondability of wafers is particularly studied. Conventional wet chemical and field-assisted methods are also examined. The resulting bond quality is assessed in terms of mechanical strength, homogeneity, and yield. The effect of spaceflight environment on the reliability of wafer bonds is also investigated. Both high and low temperature annealed bonds are found to be very robust. Effects observed are that low temperature bonds are reinforced by thermal cycling in vacuum and that high temperature bonds degrade slightly by low dose γ irradiation. Adhesion quantification is important for all bonding. Development of accurate quantification methods is considered necessary since most methods at hand are limited. This work includes the development of the blister test method. Former test structures are improved to be more practical to work with and to yield low experimental scatter. A physical stress model for the improved structure is suggested with which successful predictions of fracture for different test specimen configurations are made. The blister test method is used throughout this work to assess the strength of wafer bonds. The physics background and modelling of other common test methods are also thoroughly analysed. The methods’ practical capabilities and limitations are commented; origin and mitigation of measurement errors are discussed. It is shown that all methods can be significantly improved by small means. Weibull statistics is introduced as a tool to characterise wafer bonds. This method is suitable to use in brittle materials design as the inherent variability in strength can be properly accounted for.

The aim of the presented work was to deposit cubic boron nitride thin films by magnetron sputtering under simultaneous stress relaxation by ion implantation. An in situ instrument based on laser deflectometry on cantilever structures and in situ ellipsometry, was used for in situ stress measurements. The characteristic evolution of the instantaneous stress during the layered growth of cBN films observed in IBAD experiments, could be reproduced for magnetron sputter deposition. To achieve simultaneous stress relaxation by ion implantation, a complex bipolar pulsed substrate bias source was constructed. This power supply enables the growth of cBN thin films under low energy ion irradiation (up to 200 eV) and, for the first time, the simultaneous implantation of ions with an energy of up to 8 keV during high voltage pulses. It was demonstrated that the instantaneous stress in cBN thin films can be released down to -1.1 GPa by simultaneous ion bombardment during the high voltage pulses. A simultaneous stress relaxation during growth is possible in the total investigated ion energy range between 2.5 and 8 keV. These are the lowest ion energies reported for the stress relaxation in cBN. Since such a substrate bias power supply is easy to integrate in existing process lines, this result is important for industrial deposition of thin films, not only for cubic boron nitride films. It was found that the amount of stress relaxation depends on the number of atomic displacements (displacements per atom: dpa) that are induced by the high energy ion bombardment and is therefore dependent on the ion energy and the high energy ion flux. In practise, this means that the stress relaxation is controlled by the product of the pulse voltage and the pulse duty cycle or frequency. The cantilever bending measurements were complemented on microscopic scale by x-ray diffraction (XRD). The analysis of the cBN (111) lattice distances revealed a pronounced biaxial compressive state of stress in a non-relaxed cBN film with d(111) being larger in out-of-plane than in in-plane direction. Post deposition annealing at 900 ° C of a sample with an ion induced damage of 1.2 dpa, resulted in a complete relaxation of the lattice with equal in-plane and out-of-plane lattice parameters. In the case of medium-energy ion bombardment, the in-plane and out-of-plane lattice parameters approach the value of the annealed sample with increasing ion damage. This is a clear evidence for stress relaxation within the cBN lattice. The stability of cBN under ion bombardment was investigated by IR spectroscopy and XRD. The crystalline cBN was found to be very stable against ion irradiation. However a short-range ordered, sp3/sp2 - mixed phase may exist in the films, which could be preferably converted to a sp2 -phase at high damage values. From the analysis of the near surface region by XANES, it can be concluded the stress relaxation by the energetic ion bombardment is less at the surface than in the bulk film. This is explained with the dynamic profile of the ion induced damage, that reaches the stationary bulk value in 15-20 nm depth, whereas it is decreasing towards the surface. This fits with the results that the stress relaxation is dependent on the amount of ion induced damage. Comparing the results from substrate curvature measurement, XRD, XANES, and IR spectroscopy possible mechanisms of stress relaxation are discussed. Concluding the results, it can be stated that using simultaneous ion implantation for stress relaxation during the deposition it is possible to produce BN films with a high amount of the cubic phase and with very low residual stress.

<p>The object of this thesis is to apply scanning probemicroscopy (SPM) to the field of advanced powder processing.Measurement of interparticle surface forces at conditionsrelevant to ceramic processing has been performed together withthorough studies of powder friction.</p><p>Surface force measurements between silicon nitride andsilica surfaces in 1-bromonaphtalene and diiodomethane resultedin an attractive van der Waals force in both media for thesymmetric systems and a repulsive van der Waals force for theasymmetric systems. This agreed well with theoreticalpredictions from Lifshitz theory. Measurements in electrolytesolutions between silicon nitride surfaces with a varyingdegree of oxidation showed that silanol groups dominated theinteractions at a high degree of oxidation, whereas theinfluence of amine species became stronger after surfaceetching. Surface charge, surface potential and density ofsurface groups have been extracted from DLVO computer modellingof the experimental force curves. Surface force measurementshave been carried out using a nitrided silica sphere as acolloidal probe, representative for commercial silicon nitridepowders. Adsorption of poly(acrylic acid) above the isoelectricpoint generated a thin polymer layer of an essentially flatconformation.</p><p>Friction force measurements were attainable via novelcalibration procedures of both the lateral photodetectorresponse and the cantilever torsional spring constant.Combining the method for detector calibration with evaluationof static friction slopes simplified the choice of appropriatecontact mechanics theory to evaluate the friction measurements.Applying the method on friction measurements between ironsurfaces coated with commercial lubricants showed a substantialsurface deformation not seen from the friction force alone. Thenanorheological properties of silica surfaces coated with twodifferent stearic acids have been evaluated from friction forcemeasurements. Steady sliding motion was replaced by highlyregular stick-slip motion at a critical load and velocity. Thestick-slip motion was successfully described and fitted to aphenomenological model. The contact area evaluated fromMaugis-Dugdale theory revealed the contact diameter to be veryclose to the stick-slip periodicity.</p><p>Friction measurements were carried out between individualspray-dried ceramic granules as a function of binderconcentration and relative humidity. The hygroscopic nature ofthe binder resulted in a higher adhesion force but lowerfriction coefficient with increasing humidity. This effect wasascribed to softening of the binder and a lowering of the shearstrength of the binder rich surface layer on the granules.Comparison of the friction force between two granules and agranule and a hard metal surface confirmed that resistance toflow during the initial stages of powder pressing is dominatedby granule-wall friction and adhesion.</p><p>Keywords: Atomic force microscope, AFM, SPM, van der Waalsinteraction, DLVO-theory, surface forces, colloidal probe,force curve, friction, adhesion, stick-slip, cantilever,calibration, spring constant, silicon nitride, iron,silica.</p>

Drilled shaft retaining walls are common earth retaining structures, well suited to urban environments where noise, space, and damage to adjacent structures are major considerations. The design of drilled shaft retaining walls in non-expansive soils is well established. In expansive soils, however, there is no consensus on the correct way to account for the influence of soil expansion on wall behavior. Based on the range of design assumptions currently in practice, existing walls could be substantially over- or under-designed. The goal of this research is to advance the understanding of the effects of expansive clay on drilled shaft retaining walls. The main objectives of this study are to identify the processes responsible for wall loading and deformation in expansive clay, to evaluate how these processes change with time, and to provide guidance for design practice to account for these processes and ensure adequate wall performance. The primary source of information for this research is performance data from a four-year monitoring program at the Lymon C. Reese research wall, a full-scale instrumented drilled shaft retaining wall constructed through expansive clay in Manor, Texas. The test wall was instrumented with inclinometers and fiber optic strain gauges, and performance data was recorded during construction, excavation, during natural moisture fluctuations, and during controlled inundation tests that provided the retained soil with unlimited access to water. In addition to the test wall study, a field assessment of existing TxDOT drilled shaft retaining walls was conducted. The main process influencing short-term wall deformation was found to be global response to stress relief during excavation, which causes the wall and soil to move together without the development of large earth pressures or bending stresses. Long-term wall deformations were governed by the development of drained conditions in both the retained soil and the foundation soil after approximately eight months of controlled inundation testing. To ensure adequate wall performance, the deformations and structural loads associated with short- and long-term conditions should be combined and checked against allowable values. / text