The work presented in this thesis encompasses the design, development, realization and testing of novel magnetoelectric thin film elements that do not rely on ferromagnets, but are based entirely on magnetoelectric antiferromagnets such as Cr2O3. Thin film spintronic elements, and in particular magnetoelectric transducers, are crucial building blocks of high efficiency data processing schemes that could complement conventional electronic data processing in the future. Recent developments in magnetoelectrics have revealed, that exchange biased systems are ill-suited to electric field induced switching of magnetization due to the strong coupling of their ferromagnetic layer to magnetic fields. Therefore, ferromagnet-free magnetoelectric elements are proposed here in an effort to mitigate the practical problems associated with existing exchange biased magnetoelectric elements. This goal is achieved by establishing an all-electric read-out method for the antiferromagnetic order parameter of thin films, which allows to omit the ferromagnet from conventional exchange biased magnetoelectric elements. The resulting ferromagnet-free magnetoelectric elements show greatly reduced writing thresholds, enabled operation at room temperature and do not require a pulsed magnetic field, all of which is in contrast to state-of-the-art exchange biased magnetoelectric systems. The novel all-electric read-out method of the magnetic field-invariant magnetization of antiferromagnets, so-called spinning-current anomalous Hall magnetometry, can be widely employed in other areas of thin film magnetism. Its high precision and its sensitivity to previously invisible phenomena make it a promising tool for various aspects of thin solid films. Based on this technique, a deep understanding could be generated as to what physical mechanisms drive the antiferromagnetic ordering in thin films of magnetoelectric antiferromagnets. As spinning-current anomalous Hall magnetometry is an integral probe of the magnetic properties in thin films, it offers no intrinsic scale sensitivity. In order to harness its great precision for scale related information, a statistical framework was developed, which links macroscopic measurements with microscopic properties such as the antiferromagnetic domain size.

<div> <div> <p>Phase transition materials (PTM) have garnered immense interest in concurrent post-CMOS electronics, due to their unique properties such as - electrically driven abrupt resistance switching, hysteresis, and high selectivity. The phase transitions can be attributed to diverse material-specific phenomena, including- correlated electrons, filamentary ion diffusion, and dimerization. In this research, we explore the application space for these materials through extensive device-circuit co-design and propose new ideas harnessing their unique electrical properties. The abrupt transitions and high selectivity of PTMs enable steep (< 60 mV/decade) switching characteristics in Hyper-FET, a promising post-CMOS transistor. We explore device-circuit co-design methodology for Hyper-FET and identify the criterion for material down-selection. We evaluate the achievable voltage swing, energy-delay trade-off, and noise response for this novel device. In addition to the application in low power logic device, PTMs can actively facilitate non-volatile memory design. We propose a PTM augmented Spin Transfer Torque (STT) MRAM that utilizes selective phase transitions to boost the sense margin and stability of stored data, simultaneously. We show that such selective transitions can also be used to improve other MRAM designs with separate read/write paths, avoiding the possibility of read-write conflicts. Further, we analyze the application of PTMs as selectors in cross-point memories. We establish a general simulation framework for cross-point memory array with PTM based <i>selector</i>. We explore the biasing constraints, develop detailed design methodology, and deduce figures of merit for PTM selectors. We also develop a computationally efficient compact model to estimate the leakage through the sneak paths in a cross-point array. Subsequently, we present a new sense amplifier design utilizing PTM, which offers built-in tunable reference with low power and area demand. Finally, we show that the hysteretic characteristics of unipolar PTMs can be utilized to achieve highly efficient rectification. We validate the idea by demonstrating significant design improvements in a <i>Cockcroft-Walton Multiplier, </i>implemented with TS based rectifiers. We emphasize the need to explore other PTMs with high endurance, thermal stability, and faster switching to enable many more innovative applications in the future.</p></div></div>

In this work, an approach for copper atomic layer deposition (ALD) via reduction of CuxO films was investigated regarding applications in ULSI interconnects, like Cu seed layers directly grown on diffusion barriers (e. g. TaN) or possible liner materials (e. g. Ru or Ni) as well as non-ferromagnetic spacer layers between ferromagnetic films in GMR sensor elements, like Ni or Co. The thermal CuxO ALD process is based on the Cu (I) β-diketonate precursor [(nBu3P)2Cu(acac)] and a mixture of water vapor and oxygen ("wet O2") as co-reactant at temperatures between 100 and 130 °C. Highly efficient conversions of the CuxO to metallic Cu films are realized by a vapor phase treatment with formic acid (HCOOH), especially on Ru substrates. Electrochemical deposition (ECD) experiments on Cu ALD seed / Ru liner stacks in typical interconnect patterns are showing nearly perfectly filling behavior. For improving the HCOOH reduction on arbitrary substrates, a catalytic amount of Ru was successful introduced into the CuxO films during the ALD with a precursor mixture of the Cu (I) β-diketonate and an organometallic Ru precursor. Furthermore, molecular and atomic hydrogen were studied as promising alternative reducing agents.

Spintronics (spin based electronics) is a relatively new topic of research which is important both from the fundamental and technological point of view. In conventional electronics charge of the electron is manipulated and controlled to realize electronic devices. Spintronics uses charge as well as the spin degree of freedom of electrons, which is completely ignored in the charge based devices. This new device concept brings in a whole new set of device possibilities with potential advantages like higher speed, greater efficiency, non-volatility, reduced power consumption etc. The first realization of the spintronic device happened in 1989, owing to the discovery of the Giant Magneto-resistive (GMR) structure showing a large resistance change by the application of an external magnetic field. Nobel Prize in Physics is awarded for this discovery in 2007. In less than ten years, such devices moved from the lab to commercial devices, as read head sensors in hard disc drives. This new sensor led to an unprecedented yearly growth in the area l density of bits in a magnetic disc drive. Since 2005, another spintronic device known as Magnetic Tunnel Junction (MTJ) which shows a better performance replaced the existing GMR structures in the read heads. Another device which can potentially replace Si based Dynamic Random Access Memory (DRAM) is Magneto-resistive Random Access Memory (MRAM). Being magnetic it is non-volatile, which means not only it retains its memory with the power turned off but also there is no constant power required for frequent refreshing. This can save a lot of power(~ 10-15 Watts in a DRAM), which is quite significant amount for any portable device which runs under battery. Prototype of a commercial MRAM is also made during 2004-2005 by Infineon and Freescale Semiconductors. Recent development has shown switching of magnetic moment by spin-polarised currents (known as spin transfer torque), electric fields, and photonic fields. Instead of Oersted field switching in the conventional MRAM devices, spin torque effect can also be used to switch a magnetic element more efficiently. Recently Spin-Torque MRAM has gained lot of interest due to it’s less power consumption during the writing process. A continuous research effort is going on in realizing other proposed spintronic devices, such as Spin Torque Oscillator, Spin Field Effect Transistor , Race Track Memory etc. which are yet to get realized or yet to make their entry in the commercial devices. Spintronics can be divided in to two broad subfields viz.(1) Semiconductor Spintronics and (2) Metallic Spintronics. Most of the devices belong to the second class whereas the former one is rich in fundamental science and not yet cleared its path towards the world of application. Any spintronic device requires ferromagnetic material which is generally the source of spin polarized electrons. For semiconductor spintronic devices, the main obstacle is the non-existence of the ferromagnetic semiconductor above room temperature (RT). So the development in this direction is very much dependent on the material science research and discovery of novel material systems. Almost a decade back, Dilute Magnetic Semiconductors (DMS) are proposed to behaving RT ferromagnetism. As a result an intense theoretical and experimental research is being carried out since then on these materials. Still a general consensus is lacking both in terms of theory as well as experiment. There are many methodologies and thin film deposition protocols have been followed by different research groups to realize spintronic device concepts. The deposition techniques such as magnetron sputtering, molecular beam epitaxy have been found very efficient for growing metallic spintronic devices. For semiconductor spintronics especially in the area of Dilute Magnetic Semiconductors (DMS) pulsed laser ablation is also considered to be a viable technique. Even though pulsed laser ablation is a very powerful technique to prepare stoichiometric multi-component oxide films, it’s viability for the growth of metallic films and multilayer is considered to be limited. In this regard, we have used pulsed laser ablation to prepare pure and Co doped ZnO films, to examine the magnetic and magneto-transport behavior of these oxides. In addition extensive work has been carried out to optimize and reproducibly prepare metallic multilayer by Pulsed Laser Deposition to realize Spin Valve (SV) effect, which proves the viability of this technique for making metallic multilayer. This thesis deals with the study of Pulsed Laser Deposition(PLD) deposited DMSs and metallic SVs. The thesis is organized into seven chapters as described below: • Chapter:1 This chapter gives an introduction to Spintronics and the different device structures. It is followed by a brief description of the motivation of the present work. Since magnetism is at the heart of the spintronics, next we attempt to introduce some of the basic concepts in magnetism, which are related to the topics discussed in the following chapters. We discuss about various exchange interactions responsible for the long range ferromagnetic ordering below Curie temperature in different compounds. Other magnetic properties are also discussed. Then another important phenomenon called magnetic anisotropy is brought in. We discuss the origin of different types of anisotropy in materials. These anisotropies are also responsible for magnetic domain formation. Then a description of the different types of domain walls are introduced. Unlike conventional electronics, spintronics deals with spin polarized current. A short description of spin polarization from the band picture and concept of half-metal is introduced. The next part (Section-I) of this chapter gives an overview of the challenges in semiconductor spintronics. The spin injection efficiency from a ferromagnetic metal to a semiconductor is found to be poor. This problem is attributed to the conductivity mismatch at the interface. DMS materials can be potential candidates in order to solve this problem. Ferromagnetism in these proposed materials cannot be explained in terms of the standard exchange mechanisms. A model was first proposed for the hole doped system based on Zener model. A more apt model for the n-doped high dielectric materials is then proposed based on Bound Magnetic Polarons (BMP). These models for the unusual ferromagnetism are briefly discussed. Although ferromagnetism is observed by different groups, often questions are raised about the intrinsic origin of this behavior and the topic is still under debate. In this study we have tried to correlate the magnetic property with the transport property as the transport properties are generally not affected much by the presence of external impurities and probes the intrinsic property of the material. Transport and the magneto-transport in disordered materials in general are discussed. A specific model proposed for degenerate semiconductors, which is used for fitting our experimental data is explained. As the ferromagnetism in these materials are generally found to be related to the defects, different types of possible defects are described. Section-II deals with the metallic SV devices. In the history of spintronics, this is one of the most basic and most studied structures, but still having a lot of interest both fundamentally and technologically. A brief history of this discovery and a chronological progress in the device structure is discussed. Our work focuses on the metallic spin valve (SV) structures. Different types of SVs and their properties are explained. In a SV structure one of the ferromagnets (FM) is pinned using an adjuscent antiferromagnetic layer by an effect called exchange bias. A brief description of exchange bias and the effects of different parameters is given. This is followed by a discussion about the theory of GMR which deals with the spin dependent scattering at the bulk and at the interfaces, their relative contributions, effect of the band matching etc. A simple resistor model is used to explain the qualitative behavior of these SVs. The chapter is concluded with a brief summery and applications. • Chapter:2 This chapter provides a brief description of some of the experimental apparatus that are used to perform various experiments. The chapter is organized according to the general functionality of the techniques. This includes different thin film deposition techniques which are used depending on the requirements and also for comparing the properties of the samples, grown by different techniques. Structural, spectroscopic, magnetic and different microscopy techniques which are extensively used throughout, are discussed and their working principles are explained. This work also involves nano/microstructuring of devices. Mainly two structuring techniques are used viz. e-beam lithography and optical lithography by laser writer. In this section we will be discussing about these two techniques and other associated techniques like lift-off, etching etc. Effect of different parameters on the device structures are highlighted. • Chapter:3 Chapter-3 deals with the synthesis and characterization of the pure and 5% Co doped ZnO bulk samples. First a brief introduction about the ZnO crystal structure, band structure and other properties are given followed by the synthesis technique followed in our study. Synthesis is done by low temeperature in organic co-precipitation method. This liquid phase synthesis gives better homogeniety. As-grown sample is also sintered at a higher temperature. Structural study confirms the proper synthesis of the intended compound. Spectroscopic as well as magnetic study of the bulk doped sample indicates the presence of Co nano clusters in the low temperature synthesized sample, whereas after sintering indication of Co2+ is observed which reflects in the magnetic property as well. These samples are used as target material for laser ablation. • Chapter:4 Chapter-4 presents the results of the pure and Co doped ZnO thin film samples. Thin films are grown by PLD method on r-plane Sapphire substrates. Details of the growth technique and the deposition parameters are explained. Our result shows that 5% Co doped ZnO thin film is ferromagnetic in nature as expected in a DMS material, although the film is grown using a paramagnetic target. We also report that pure ZnO grown in an oxygen deficient condition giving ferromagnetic behavior. Not only that, the obtained saturation moment is much higher compared to the Co doped sample. We have demonstrated that the FM can be tuned by tuning the oxygen content and FM disappears when the film is annealed in an oxygen environment .But for the Co doped sample magnetic property could not be tuned much as Co doping stabilizes the surface states. To exclude the possibilities of the extrinsic origin we have done a detailed magneto-transport study for both doped and undoped films. For ZnO, we have shown a one to one correlation of the magnetic and magneto-transport data which further supports the fact that the obtained magnetic behavior is intrinsic. Fitting of the magnetorsistance (MR) data for the pure and Co doped ZnO samples is done using a semi-empirical formula, consisting of both positive and negative MR terms originally proposed for degenerate semiconductors .Excellent agreement of the experimental data is found with the formula. For pure ZnO sample we have extracted the mobility, carrier concentration etc .by Hall measurement. The fabrication steps of Hall bar sample which involves optical lithography and ion beam etching are discussed. 3D e-e interaction induced transport mechanism is found to be dominant in case of oxygen deficient pure ZnO. • Chapter:5 Chapter-5 demonstrates the tuning of band gap of ZnO by alloying with MgO. By changing the ZnO:MgO ratio in PLD grown films, we could tune the band gap over a wide range. Composition alanalysis is done by Rutherford Back-Scattering. Structural and spectroscopic studies are carried out, which shows tuning of band gap upon alloying with MgO. We could tune ZnO band gap from 3.3eV to 3.92eV by30% MgO alloying, while retaining the Wurtzite crystal structure. • Chapter:6 Chapter-6 demonstrates the metallic Pseudo Spin Valve (PSV) structures grown by sputtering and by PLD. Main focus of this chapter is to show that, PLD can be aviable technique for making metallic PSV and Spin Valve (SV) structures. This is almost an unexplored technique for growing metallic thin film SVs, as it is evident in the literature. NiFe and Co are used as the soft and hard FM layers respectively, Au and Cu are used as the spacer layer. FeMn is used for pinning the Co layer in case of the SV structures. The first section describes the properties of these materials and then substrate preparation, deposition parameters etc. are explained in details. Properties of sputter deposited PSV structures are also described. Thickness variation of different layers, double PSV structure and angular variation of the MR properties are presented. Generally two measurement geometries are followed for the SV measurements viz.(1) Current In Plane (CIP) and (2) Current Perpendicular to Plane(CPP). We have carried out MR studies in both the measurement geometries. Measurement in CPP geometry is much more involved than CIP and need structuring with multiple lithography steps. CPP measurement geometry scheme and the process steps are discussed. For this measurement a special ac bridge technique is followed which is also discussed. In the next part we have demonstrated PSV and SV structures, grown, using PLD in an Ultra High Vacuum (UHV) system. Not only that, we have obtained a CIPMR as high as 3.3%. PLD is generally thought to be a technique for oxide deposition and metallic multilayers are not deposited due to particulate formation, high enegy of the adatom species which can lead to inter-mixing at the interface etc. But in this study we have shown that by properly tuning the deposition parameters, it is possible to grow SVs using PLD. We have found the roughness of the PLD grown films are much lower compared to the sputtered films. For top SV structures we have obtained exchange bias even in the absence of applied field during deposition. This effect is observed by performing magnetic and magneto-resistance measurements. Effect of different layer thicknesses, field annealing etc. are discussed. Two different spacer layers are used and their properties are compared. We have found that the interface engineered structures are giving highest MR among the different samples. Then a conclusion of our study is presented followed by a discussion on the difficulties and challenges faced for optimizing the PLD grown SVs. • Chapter:7 Finally, in Chapter-7, various results are summarized and a broad outlook is given. Perspectives for the continuation of the present work is also given.

Low-dimensional (D) materials, such as graphene, transition metal dichalcogenides and chalcogenide nanowires, are attractive for spintronics and valleytronics due to their unique physical and chemical properties resulting from low dimensionality. Emerging concepts of spintronics devices will greatly benefit from using 1D and 2D materials, which opens up new ways to manipulate spin. A majority of 1D and 2D materials is non-magnetic, thus their applications in spintronics are limited. The exploration, design and synthesis of new 1D and 2D materials with intrinsic magnetism and high spin-polarization remains a challenge. In addition, the valley polarization and spin-valley coupling properties of 2D materials have attracted great attention for valleytronics, which not only manipulates the extra degree of freedom of electrons in the momentum space of crystals but also proposes a new way to store the information. The computational investigation of magnetic and electronic properties of low-dimensional materials is the subject of this thesis. We have systematically investigated geometric, electronic, magnetic and valleytronic properties of several 2D and 1D materials by using the density functional theory. These investigations not only theoretically show rich and adjustable magnetic properties of...

In this work, an approach for copper atomic layer deposition (ALD) via reduction of CuxO films was investigated regarding applications in ULSI interconnects, like Cu seed layers directly grown on diffusion barriers (e. g. TaN) or possible liner materials (e. g. Ru or Ni) as well as non-ferromagnetic spacer layers between ferromagnetic films in GMR sensor elements, like Ni or Co. The thermal CuxO ALD process is based on the Cu (I) β-diketonate precursor [(nBu3P)2Cu(acac)] and a mixture of water vapor and oxygen ("wet O2") as co-reactant at temperatures between 100 and 130 °C. Highly efficient conversions of the CuxO to metallic Cu films are realized by a vapor phase treatment with formic acid (HCOOH), especially on Ru substrates. Electrochemical deposition (ECD) experiments on Cu ALD seed / Ru liner stacks in typical interconnect patterns are showing nearly perfectly filling behavior. For improving the HCOOH reduction on arbitrary substrates, a catalytic amount of Ru was successful introduced into the CuxO films during the ALD with a precursor mixture of the Cu (I) β-diketonate and an organometallic Ru precursor. Furthermore, molecular and atomic hydrogen were studied as promising alternative reducing agents.

Since many years, the importance of thin layers increases for lots of technical uses. Beginning in the field of microelectronics, the use of thin layers spread increasingly to other areas. Coatings for surface refining and optimisation of the mechanical properties for material engineering, customisation of the surface chemistry in catalysts, as well influencing of the transmission and reflection characteristics of surfaces in optics are only some examples of the high scientific and economic weight of the thin layer technology. Thin magnetic layers are the basis of many known storage media ranging from the tape recorder to the hard disk up to the credit card. Nowadays, these thin layers again gain interest in the research field of nanoelectronics as ultrathin layers. So-called spinvalve-read/write heads being already installed in actual hard disks use the Tunnel Magneto Resistance effect for a significant rise in memory density synonymous capacity. Such read/writeheads consist of a magnetic layersystem. This use of the magnetic as well as the electric characteristics of the electrons is called spintronics. The iron oxide magnetite exhibits a high iron portion, is strong antiferrimagnetic and has a high Curie-temperature. Since many years, it is used as a magnetic pigment on already mentioned magnetic tapes. Literature [1, 2, 3, 4] considers ultrathin epitaxial layers of magnetite on magnesium oxide for uses in the spintronics as a most promising candidate, because it inheres a complete spin polarisation at Fermi-level. Moreover, thin magnetite layers serve in the chemical industry as a catalyst in the Haber- Bosch-procedure and to the dehydration of ethylbenzene to styrene. Being already used and considered to be of ongoing interest, ultrathin magnetite layers offer a wide range of technological applications in many modern industrial and scientific fields. Because there is, nevertheless, a variety of other iron oxide (cf. chapter 4), it is a matter to determine the special growth conditions of magnetite. These ultrathin iron oxide layers were grown reactively on the (001)-surfaces of the magnesium oxide substrate by molecular beam epitaxy. Besides, the surface is examined by the diffraction of low-energy electrons concerning its crystalline structure. X-ray photo electron spectroscopy approaching the stochiometry completes these first characterisations. Other investigations are carried out at HASYLAB / DESY in Hamburg by X-ray reflectivity and X-ray diffraction. The exact thickness of the layers, its crystal properties in bulk, as well as the thickness of the crystalline portion of the layers can be determined among other features of the system. The evaluation of XRR-and XRD-investigations is done via simulations with in chapter 5 introduced software packages. The reader finds the theoretical backgrounds to the used techniques in chapter 3. The experimental setups in Osnabr¨uck and Hamburg as well as the backgrounds to the preparation are presented in chapter 5. Because the formation of the different iron oxides is described in literature [5, 6, 7, 8] as mostly depending on annealing temperatures, the experimental results in chapter 6 are graded accordingly. The dependence on temperature, layer thickness and annealing time should be examined for the iron oxides possible on this substrate. The aim of this work is the preparation of ultrathin epitaxial iron oxide layers with thicknesses up to few nanometers. The main goal is to find the growth parameters for ultrathin crystalline magnetite layers.

<p dir="ltr">Probabilistic computing is a novel computing scheme that offers a more efficient approach than conventional complimentary metal-oxide-semiconductor (CMOS)-based logic in a variety of applications ranging from Bayesian inference to combinatorial optimization, and invertible Boolean logic. These applications, which have found use in the rapidly growing fields of machine learning and artificial intelligence, are traditionally computationally-intensive and so make the push for novel computing schemes that are intrinsically low-power and scalable all the more urgent.</p><p dir="ltr">The probabilistic bit (or p-bit, the base unit of probabilistic computing) is a naturally fluctuating entity that requires <i>tunable </i>stochasticity; low-barrier nanomagnets, in which the magnetic moment fluctuates randomly and continuously due to the presence of thermal energy, are a natural vehicle for providing the core functionality required. This dissertation describes the work done in mining the rich field of spintronics to produce devices that can act as natural hardware accelerators for probabilistic computing algorithms.</p><p dir="ltr">First, experiments exploring Fe₃O₄ nanoparticles as naturally stochastic systems are presented. Using NV center measurements on an array of such nanoparticles, it is shown that they fluctuate intrinsically at GHz frequencies at room temperature; these fluctuations could be harnessed to act as a stochastic noise source, and would, in principle, enable fast computation.</p><p dir="ltr">The focus then shifts to the development of a platform that allows for easier <i>electrical</i> readout: the low-barrier magnetic tunnel junction (MTJ). We show the work done in the development and characterization of these devices, how they respond to non-ideal environments, such as elevated temperatures and exposure to high-energy electromagnetic radiation, how their intrinsic stochasticity might be tuned with electrical currents and external magnetic fields, and then how these might be integrated with a simple transistor circuit to produce a compact low-energy implementation of a p-bit.</p><p dir="ltr">Next, by integrating our stochastic MTJs with 2D-MoS₂field-effect transistors (FETs), the first <i>on-chip </i>realization of a key p-bit building block, displaying voltage-controllable stochasticity, is demonstrated. This is followed by another key demonstration through the fabrication of stochastic MTJs directly on top of an integrated circuit platform, where the transistor circuitry is provided by 180nm-node CMOS technology.</p><p dir="ltr">In addition, supported by circuit simulations, this work provides a careful device-level analysis of the three transistor-one magnetic tunnel junction (3T-1MTJ) p-bit design, evaluating how the characteristics of each component can influence the overall p-bit’s output. In particular, we show that – against common wisdom – a large tunnel magnetoresistance (TMR) is not the best choice for p-bits; bimodal telegraphic fluctuations are highly undesirable and are a sign of a slow device; and an ideal inverter with a large gain is unsuitable for p-bit applications due to the higher likelihood of unwanted plateaus in the resulting p-bit’s output.</p><p dir="ltr">This analysis is extended to consider the impact of such non-ideal p-bits when used to construct probabilistic circuits, with the focus on the emulation of the Boolean logic AND gate through a three p-bit correlated system. It is found that a probabilistic circuit made with ideal p-bits can accurately emulate the function of an AND gate, while the non-ideal p-circuits suffer from an increased error rate in emulating the AND gate’s truth table.</p><p dir="ltr">The understanding gained at the individual device level, in what makes a good or bad MTJ, to how the different components of the 3T-1MTJ p-bit can affect its output, and subsequently how non-ideal p-bits can impact circuit performance, can be important for the future realization of scaled on-chip p-bit networks.</p>

The present thesis is about the investigation of ferromagnetic thin film systems with respect to exchange coupling, magnetization reversal behavior and effects appearing in magnetic heterostructures, namely the exchange bias and the giant magnetoresistance effect. For this purpose, DC magnetron sputtered thin films and multilayers with perpendicular magnetic anisotropy were prepared on single crystalline and rigid as well as flexible amorphous substrates. The first part concentrates on magnetic data storage applications based on the combination of the concept of bit patterned media and three dimensional magnetic memory, consisting of at least two exchange decoupled ferromagnetic storage layers. Here, [Co/Pt] multilayers, revealing different magnetic anisotropies, have been applied as storage layers and as spacer material Pt and Ru was employed. By the characterization of the magnetization reversal behavior the exchange coupling in dependence of the spacer layer thickness was studied. Furthermore, with regard to the concept of bit patterned media, the layers were also grown on self-assembled silica particles, leading to an exchange decoupled single-domain magnetic dot array, which was studied by magnetic force microscope imaging and angular dependent magneto-optic Kerr effect magnetometry to evaluate the reversal mechanism and its dependence on the array dimensions, mainly the diameter of the silica particles and layer thicknesses. To complete the study, micromagnetic simulations were performed to access smaller dimensions and to investigate the dependence of intralayer as well as interlayer coupling on the magnetization reversal of the dot array with multiple storage layers. The second part focuses on the investigation of the giant magnetoresistance effect in systems with perpendicular magnetic anisotropy, where L10 -chemically ordered FePt alloys and [Co/Pt] as well as [Co/Pd] multilayers were utilized. In case of FePt, where high temperatures during the deposition are necessary to induce the chemical ordering, diffusion and alloying of the spacer material often prevent a sufficient exchange decoupling of the ferromagnetic layers. However, with Ru as spacer material a giant magnetoresistance effect could be achieved. Large improvements of the magnetoresistive behavior of such trilayer structures are presented for [Co/Pt] and [Co/Pd] multilayers, which can be deposited at room temperature not limiting the choice of spacer as well as substrate material. Furthermore, in systems consisting of one ferromagnet with perpendicular magnetic anisotropy and one ferromagnet with in-plane magnetic easy axis, a linear and almost hysteresis-free field dependence of the electrical resistance was observed and the behavior for various thickness series has been intensively studied. Finally, the corrosion resistance in dependence of the capping layer material as well as the magnetoresistance of a strained flexible pseudo-spin-valve structure is presented. In addition, in chapter 2.5.2 an experimental study of an improved crystal growth of FePt at comparable low temperatures by molecular beam epitaxy and further promoted by a surfactant mediated growth using Sb is shown. Auger electron spectroscopy as well as Rutherford backscattering spectrometry were carried out to confirm the surface segregation of Sb and magnetic characterization revealed an increase of magnetic anisotropy in comparison to reference layers without Sb. / Die vorliegende Dissertation beschäftigt sich mit der Untersuchung ferromagnetischer Dünnschichtsysteme im Hinblick auf die Austauchkopplung, das Ummagnetisierungsverhalten und Effekte wie z.B. den Exchange Bias Effekt oder den Riesenmagnetwiderstandseffekt (GMR), welche in derartigen Heterostrukturen auftreten können. Die Probenpräparation erfolgte mittels DC Magnetronsputtern, wobei auf einkristallinen aber auch flexiblen sowie starren amorphen Substraten abgeschieden wurde. Im ersten Teil der Arbeit werden Untersuchungen mit dem Hintergrund einer Anwendung als magnetischer Datenträger vorgestellt. Konkret werden hier die Konzepte Bit Patterned Media (BPM) und 3D Speicher miteinander kombiniert. Letzteres Konzept basiert auf der Verwendung wenigstens zweier austauschentkoppelter ferromagnetischer Schichten, für welche [Co/Pt] Multilagen mit unterschiedlicher magnetischer Anisotropie verwendet wurden. Als Zwischenschichtmaterial diente Pt und Ru. Durch die Charakterisierung des Ummagnetisierungsverhaltens wurde die Austauschkopplung in Abhängigkeit der Zwischenschichtdicke untersucht. Darüber hinaus wurden jene Schichtstapel zur Realisierung des BPM-Konzeptes auf selbstangeordnete SiO2 Partikel mit unterschiedlichen Durchmessern aufgebracht, durch welche sich lateral austauschentkoppelte, eindomänige magnetische Nanostrukturen erzeugen lassen. Zur Untersuchung des Ummagnetisierungsverhaltens und der jeweiligen Größenabhängigkeiten (maßgeblich Durchmesser und Schichtdicke) wurden diese mittels Magnetkraftmikroskopie sowie winkelabhängiger magnetooptischer Kerr Effekt Magnetometrie untersucht. Zur weiteren Vertiefung des Verständnisses noch kleinerer Strukturgrößen erfolgten mikromagnetische Simulationen, bei denen die magnetischen Wechselwirkungen lateral (benachbarte 3D Elemente) als auch vertikal (Wechselwirkungen ferromagnetischer Schichten innerhalb eines 3D Elementes) im Interesse standen, sowie deren Auswirkungen auf das Ummagnetisierungsverhalten des gesamten Feldes. Der Fokus des zweiten Teils liegt auf der Untersuchung des Riesenmagnetwiderstandseffektes in Systemen mit senkrechter Sensitivität. Dafür sind ferromagnetische Schichten mit senkrechter magnetischer Anisotropie nötig, wobei hier die chemisch geordnete L10-Phase der FePt Legierung und [Co/Pt] sowie [Co/Pd] Multilagen Anwendung fanden. Für eine chemische Ordnung der FePt Legierung sind hohe Temperaturen während der Schichtabscheidung notwendig, welche eine hinreichende Austauschentkopplung beider ferromagnetischer Schichten meist nicht gewährleisten. Grund dafür sind einsetzende Diffusionsprozesse als auch Legierungsbildungen mit dem Zwischenschichtmaterial. In der vorliegenden Arbeit konnte der GMR Effekt daher ausschließlich mit einer Ru Zwischenschicht in FePt basierten Trilagensystemen nachgewiesen und charakterisiert werden. Enorme Verbesserungen der magnetoresistiven Eigenschaften werden im Anschluss für [Co/Pt] und vor allem [Co/Pd] Multilagen vorgestellt. Diese Schichtsysteme mit senkrechter magnetischer Anisotropie können bei Raumtemperatur präpariert werden und stellen daher keine weiteren Anforderungen an das Zwischenschichtmaterial sowie die verwendeten Substrate. Hier wurden neben Systemen mit ausschließlich senkrechter magnetischer Anisotropie auch Systeme mit gekreuzten magnetischen Anisotropien intensiv untersucht, da diese durch einen linearen und weitgehend hysteresefreien R(H) Verlauf imHinblick auf Sensoranwendungen enorme Vorteile bieten. Letztendlich wurde die Korrosionsbeständigkeit in Abhängigkeit des Deckschichtmaterials als auch die mechanische Belastbarkeit von auf flexiblen Substraten abgeschiedenen GMR-Schichtstapeln untersucht. Zusätzlich wird in Kapitel 2.5.2 eine experimentelle Studie zum Surfactant-gesteuerten Wachstum der FePt Legierung mittels Molekularstrahlepitaxie vorgestellt. Als Surfactant dient Sb, wodurch die Kristallinität bei geringer Depositionstemperatur deutlich verbessert werden konnte. Die Oberflächensegregation von Sb wurde mittels Auger Elektronenspektroskopie und Rutherford Rückstreuspektrometrie verifiziert und die Charakterisierung magnetischer Eigenschaften belegt einen Anstieg der magnetischen Anisotropieenergie im Vergleich zu Referenzproben ohne Sb.

The work presented in this thesis encompasses the design, development, realization and testing of novel magnetoelectric thin film elements that do not rely on ferromagnets, but are based entirely on magnetoelectric antiferromagnets such as Cr2O3. Thin film spintronic elements, and in particular magnetoelectric transducers, are crucial building blocks of high efficiency data processing schemes that could complement conventional electronic data processing in the future. Recent developments in magnetoelectrics have revealed, that exchange biased systems are ill-suited to electric field induced switching of magnetization due to the strong coupling of their ferromagnetic layer to magnetic fields. Therefore, ferromagnet-free magnetoelectric elements are proposed here in an effort to mitigate the practical problems associated with existing exchange biased magnetoelectric elements. This goal is achieved by establishing an all-electric read-out method for the antiferromagnetic order parameter of thin films, which allows to omit the ferromagnet from conventional exchange biased magnetoelectric elements. The resulting ferromagnet-free magnetoelectric elements show greatly reduced writing thresholds, enabled operation at room temperature and do not require a pulsed magnetic field, all of which is in contrast to state-of-the-art exchange biased magnetoelectric systems. The novel all-electric read-out method of the magnetic field-invariant magnetization of antiferromagnets, so-called spinning-current anomalous Hall magnetometry, can be widely employed in other areas of thin film magnetism. Its high precision and its sensitivity to previously invisible phenomena make it a promising tool for various aspects of thin solid films. Based on this technique, a deep understanding could be generated as to what physical mechanisms drive the antiferromagnetic ordering in thin films of magnetoelectric antiferromagnets. As spinning-current anomalous Hall magnetometry is an integral probe of the magnetic properties in thin films, it offers no intrinsic scale sensitivity. In order to harness its great precision for scale related information, a statistical framework was developed, which links macroscopic measurements with microscopic properties such as the antiferromagnetic domain size.:TABLE OF CONTENTS Abbreviations 9 1 Introduction 11 1.1 Motivation 11 1.2 Objectives 12 1.3 Organization of the thesis 13 2 Background 15 2.1 History of magnetoelectric coupling 15 2.2 Long range magnetic ordering 16 2.2.1 Magnetic order parameter and field susceptibility 17 2.2.2 Magnetic proximity effect 19 2.2.3 Exchange bias 20 2.3 Phenomenology of magnetoelectric coupling 21 2.3.1 The linear magnetoelectric effect 21 2.3.2 Magnetoelectric pressure on the antiferromagnetic order parameter 22 2.3.3 Switching the antiferromagnetic order parameter 23 2.4 Realized magnetoelectric thin film elements 24 2.4.1 BiFeO3/CoFe system 24 2.4.2 Cr2O3/Co/Pt system 25 3 Experimental methods 27 3.1 Development of ferromagnet free magnetoelectric elements 28 3.1.1 The substrate 29 3.1.2 The Cr2O3 bulk and top surface 31 3.1.3 The V2O3 or Pt bottom electrodes 33 3.1.4 Epitaxial relationships 34 3.1.5 The Cr2O3 bottom interface 39 3.1.6 Twinning of Cr2O3 39 3.1.7 Hall crosses and patterning processes 43 3.2 Magnetotransport measurements 44 3.2.1 Hall effects 45 3.2.2 Anomalous Hall effect 46 3.2.3 Magnetoelectric writing 47 3.2.4 All electric read out 49 3.3 The experimental setup 50 3.3.1 Temperature control 50 3.3.2 Magnetic field control 51 4 Spinning-current anomalous Hall magnetometry 53 4.1 Characteristics of the technique 53 4.1.1 Operational principle 53 4.1.2 Advantages 55 4.1.3 Magnetic hysteresis loops and field-invariant magnetization 55 4.1.4 Measurement of field-invariant magnetization 56 4.1.5 Limitations 58 4.2 Application of SCAHM to Cr2O3(0001) thin films 59 4.2.1 Criticality and distribution of the antiferromagnetic phase transition 61 4.2.2 Evaluation of the magnetic proximity effect 64 4.3 SCAHM with thin metallic antiferromagnetic IrMn films 65 4.3.1 [Pt/Co]4/IrMn exchange bias system 65 4.3.2 Isolated antiferromagnetic IrMn thin films 67 5 Magnetoelectric performance 69 5.1 Magnetoelectric field cooling 69 5.2 The gate bias voltage 71 5.3 Isothermal binary magnetoelectric writing in Cr2O3 72 6 Order parameter selection in magnetoelectric antiferromagnets 77 6.1 Uncompensated magnetic moment 77 6.2 Extrinsic causes for broken sublattice equivalence 81 6.3 The V2O3 gate electrode 83 7 Measurement of microscopic properties with an integral probe 87 7.1 Interentity magnetic exchange coupling 87 7.2 Ensemble formalism for the entity size determination 90 7.3 Estimation of the entity sizes 94 7.4 Microscopic confirmation of the ensemble model 97 8 Summary and Outlook 101 8.1 Goal-related achievements 101 8.1.1 All-electric read-out of the AF order parameter 101 8.1.2 Electric field induced writing of the AF order parameter 102 8.2 Further achievements 103 8.2.1 Foreseen impact of SCAHM on thin film magnetism 103 8.2.2 Practical optimization routes of magnetoelectric Cr2O3 systems 104 8.2.3 Theoretical work 105 8.3 Future directions 105 8.3.1 Development of Cr2O3-based magnetoelectric systems 105 8.3.2 Applications of SCAHM 106 References 107 Erklärung 113 Acknowledgements 115 Curriculum Vitae 117 Scientific publications, contributions, patents 119