本論文では，遮断周波数以下のTE・TMモードを利用した右手/左手系複合円筒導波管および方形導波管を提案する．この提案したCRLH導波管にスリットまたはスロットを設けることで構成された導波管型漏洩波アンテナの放射特性について述べている．最後に，CRLH導波管を試作し解析結果と実験結果の比較を行うことで，CRLH方形・円筒導波管の構成法の有用性を明らかにする． / This paper proposes a composite right/left-handed cylindrical and rectangular waveguides using the cutoff TE and TM modes. The CRLH waveguides can be successfully applied to radiation characteristics of leaky-wave antenna by setting slits or slots. Finally, usefulness of the proposed CRLH waveguides is verified by comparison between the calculated and the measured values. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University

With the rise of high frequency communication systems such as 5G, new types of antennas has to be developed in order to meet the new requirements. In recent years, lens antennas made of periodic structures has been shown to have desirable performance when increasing operational frequency without increasing the size of the antennas. One way of manufacturing the lenses for the antennas are with 3D printers loaded with dielectrics with specified permittivity. This project group studied the process of designing and manufacturing a flat Maxwell fish eye lens at 5 GHz with a bandwidth of 3.5 GHz to 6 GHz. The resulting design is a lens based on a periodic configuration of cuboid unit cells made from dielectrics which consisted of a hole. By choosing the ratio of dielectric and holes in the unit cells, each part of the lens could be tuned to achieve a specific effective refractive index required for realising the Maxwell fish eye lens.

Metamaterials are artificially designed materials with desired electromagneticresponses for advanced wave manipulation. Their key constituent is often somenoble metal, thanks to its well localized plasmonic effects with highextinction cross section. In this project, a metamaterial based onmetal-insulator-metal (MIM) structure is investigated to create a compactplanar reflector which mimics the function of a parabolic mirror. In such ametamaterial, each MIM unit is essentially a sub-wavelength resonator whichexhibits magnetic-dipole resonance. To achieve focusing effect, phase shift onreflected wave by each MIM unit upon a plane-wave incidence is calculatedrigorously through finite-element method. By carefully selecting unitgeometries and thereby introducing a phase gradient along the reflector plane,one can control propagation direction of reflected wave at each reflectorposition. The principle can be explained in terms of either ray-optics theoryor generalized Snell’s law. As a particular demonstration, we have designed inthe thesis a planar reflector consisting of eleven MIM units with a totaldevice width of 5.5 µm. FEM simulation showed that the reflector focuses lightat 1.2 µm wavelength with a nominal focus length of 6 µm. Such compactmetamaterial devices can be potentially fabricated on chips for sensing andtelecom applications, circumventing many inconveniences of includingconventional lenses in an optical system. / Metamaterial är artificiellt konstruerade material med vissa önskadeelektromagnetiska egenskaper, vilket kan utnyttjas för avancerad styrning avelektromagetisk vågutbredning. Metamaterialet som undersöks i denna rapportär baserad på en metall-isolator-metall (MIM) struktur, denna strukturkommer användas för konstruktion av en platt parabolisk reflektor. Vilket isin tur består av en serie MIM-strukturer med varierande storlekar. VarjeMIM-struktur är i princip en resonator med en storleksordning mycket mindreän våglängden och ger upphov till en magnetisk resonans. För att sedan uppnåfokus genomförs en rigorös beräkning av fasen med hjälp av finita elementmetoden, varpå man kan beräkna fas och amplitud från strukturen efterreflektion från en plan våg. Därefter kan man välja ut de geometrierna somkrävs för att styra riktningen av vågpropagationen med en fasgradient.Fysikaliska principerna kan förklaras genom stråloptik eller med hjälp avgeneraliserade Snell's lag. I denna rapport presenteras en design av en planreflektor med elva MIM strukturer där den totala storleken är 5.5 µm. FEMsimulering visade att reflektorn fokuserade ljuset vid våglängden 1.2 µm medden nominella fokallängden 6 µm. Dessa kompakta metamaterial kan eventuellttillverkas på chip för detektering och telekom, vilket löser problemen medatt inkludera konventionella linser i optiska system.

Silicon photonics (SiP) has become a cornerstone technology of the modern age by leveraging the mature fabrication processes and infrastructure of the microelectronics industry for the cost-effective and high-volume production of compact and power-efficient photonic integrated circuits (PICs). The impact that silicon (Si)-based PICs have had on data communications, particularly data center interconnection and optical transceiver technologies, has encouraged SiP chip development and their use in other applications such as artificial intelligence, biomedical sensing and engineering, displays for augmented/virtual reality, free-space communications, light detection and ranging, medical diagnostics, optical spectroscopy, and quantum computing and optics. To expand the functionality and improve the performance of SiP circuits for these surging applications, subwavelength grating (SWG) metamaterials have been thoroughly investigated and implemented in various passive integrated photonic components fabricated on the silicon-on-insulator (SOI) platform. SWG metamaterials are periodic structures composed of two materials with different permittivities that exhibit unnatural properties by using a period shorter than the guided wavelength of light propagating through them. The ability to synthesize the constituent SiP materials without any need to alter standard fabrication procedures enables precise, flexible control over the electromagnetic field and sophisticated selectively over anisotropy, dispersion, polarization, and the mode effective index in these metastructures. This provides significant benefits to SOI devices, such as low loss mode conversion and propagation, greater coupling efficiencies and alignment tolerances for fiber-chip interfaces, ultrabroadband operation in on-chip couplers, and improved sensitivities and limits of detection in integrated photonic sensors. Parallel to the rise of SiP technology is the development of other materials compatible with mature PIC fabrication methods both in the foundry (e.g., silicon nitride (Si3N4)) and outside the foundry (e.g., high-index oxide glasses such as aluminum oxide (Al2O3) and tellurium oxide (TeO2)). Si3N4 offsets the pitfalls of Si as a passive waveguiding material, providing lower scattering and polarization-dependent losses, optical transparency throughout the visible spectrum, increased tolerance to fabrication error, and better handling of high-power optical signals. Meanwhile, Al2O3 and TeO2 both serve as excellent host materials for rare-earth ions, and TeO2 possesses strong nonlinear optical properties. Using a single-step post-fabrication thin film deposition process, these materials can be monolithically integrated onto Si PICs at a wafer scale, enabling the realization of complementary-metal-oxide-semiconductor (CMOS)-compatible, hybrid SiP devices for linear, nonlinear, and active functionalities in integrated optics. While SWG metamaterials have widely impacted the design space and applicability of integrated photonic devices in SOI, they have not yet made their mark in other material systems outside of Si. Furthermore, demonstrations of their capabilities in active processes, including optical amplification, are still missing. In this thesis, we present a process for developing various SWG metamaterial-engineered integrated photonic devices in different material systems both within and beyond SOI. The demonstrations in this thesis emphasize the benefits of SWG metamaterials in these devices and realize their potential for enhancing functionality in applications such as sensing and optical amplification. The objective of the thesis is to highlight the prospects of SWG metamaterial implementation in different media used in integrated optics. This is accomplished by experimentally demonstrating SWG metamaterial waveguides, ring resonators and other components composed of different hybrid core-cladding material systems, including Si-TeO2 and Si3N4-Al2O3. Chapter 1 introduces the background and motivation for integrated optics and SWG metamaterials and provides an overview and comparison of the different materials explored in this work. Chapter 2 presents an initial experimental demonstration of TeO2-coated SOI SWG metamaterial waveguides and mode converters. It also details the design of fishbone-style SWG waveguides aimed at lowering loss and enhancing mode overlap with the active TeO2 cladding material in the hybrid SiP platform. Chapter 3 details an open-access Canadian foundry process for rapid prototyping of Si3N4 PICs, emphasizing the Si3N4 material and waveguide fabrication methods, as well as the design and characterization of various integrated photonic components included in a process design kit. The platform is compared against other Si3N4 foundries, and plans for further development are also discussed. Chapter 4 reports the first demonstration of SWG metamaterial waveguides and ring resonators fabricated using a Si3N4 foundry platform. The measured devices have a propagation loss of ∼1.5 dB/cm, an internal quality factor of 2.11·10^5, and a bulk sensitivity of ∼285 nm/RIU in the C-band, showcasing competitive metrics with conventional Si3N4 waveguides and SWG ring resonators and sensors reported in SOI. Chapter 5 presents work towards an SWG metamaterial-engineered waveguide amplifier. The fabricated device, based in Si3N4 and functionalized by an atomic layer deposited, erbium-doped Al2O3 thin film cladding, exhibited a signal enhancement of ∼8.6 dB, highlighting its potential for on-chip optical amplification. Methods to reduce the loss within the material system are proposed to achieve net gain in future devices. Chapter 6 summarizes the thesis and discusses pathways for optimizing the current devices as well as avenues for exploring new and intriguing materials and devices for future applications in integrated photonics. / Thesis / Doctor of Philosophy (PhD)

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In dieser Arbeit untersuchen wir mehrere Anwendungen von photonischen und plasmonischen Nanostrukturen unter Verwendung zweier verschiedener numerischer Methoden: die Fourier-Moden-Methode (FMM) und ein unstetiges Galerkin-Zeitraumverfahren (discontinuous Galerkin time-domain method, DGTD method). Die Methoden werden für vier verschiedene Anwendungen eingesetzt, die alle eine Materialmodellerweiterung in der Implementierung der Methoden erfordern. Diese Anwendungen beinhalten die Untersuchung von dünnen, freistehenden, periodisch perforierten Goldfilmen. Wir charakterisieren die auftretenden Oberflächenplasmonenpolaritonen durch die Berechnung von Transmissions- und Elektronenenergieverlustspektren, die mit experimentellen Messungen verglichen werden. Dazu stellen wir eine Erweiterung der DGTD-Methode zur Verfügung, die sowohl absorbierende, impedanzangepasste Randschichten als auch Anregung mit geglätteter Ladungsverteilung für materialdurchdringende Elektronenstrahlen beinhaltet. Darüber hinaus wird eine Erweiterung auf nicht-dispersive anisotrope Materialien für eine Formoptimierung einer volldielektrischen magneto-optischen Metaoberfläche verwendet. Diese Optimierung ermöglicht eine verstärkte Faraday-Rotation zusammen mit einer hohen Transmission. Zusätzlich untersuchen wir abstimmbare hyperbolische Metamaterialresonatoren im nahen Infrarot mit Hilfe der FMM. Wir berechnen deren Resonanzen und vergleichen sie mit dem Experiment. Zum Schluss wird die Implementierung eines nichtlinearen Vier-Niveau-System-Materialmodells in der DGTD-Methode verwendet, um die Laserschwellen eines Mikroresonators mit Bragg-Spiegeln zu berechnen. Bei Einführung eines Silbergitters mit variablen Spaltgrößen wird eine defektinduzierte Kontrolle der Laserschwellen ermöglicht. Die Berechnung der vollständigen, zeitaufgelösten Felddynamik innerhalb des Resonator gibt dabei Aufschluss über die beteiligten Lasermoden. / In this thesis, we study several applications of photonic and plasmonic nanostructures by employing two different numerical methods: the Fourier modal method (FMM) and discontinuous Galerkin time-domain (DGTD) method. The methods are used for four different applications, all of which require a material model extension for the implementation of the methods. These applications include the investigation of thin, free-standing periodically perforated gold films. We characterize the emerging surface plasmon polaritons by computing both transmittance and electron energy loss spectra, which are compared to experimental measurements. To this end, we provide an extension of the DGTD method, including absorbing stretched coordinate perfectly matched layers as well as excitations with smoothed charge distribution for material-penetrating electron beams. Furthermore, an extension to non-dispersive anisotropic materials is used for shape optimization of an all-dielectric magneto-optic metasurface. This optimization enables an enhanced Faraday rotation along with high transmittance. Additionally, we study tuneable near-infrared hyperbolic metamaterial cavities with the help of the FMM. We compute the cavity resonances and compare them to the experiment. Finally, the implementation of a non-linear four-level system material model in the DGTD method is used to compute lasing thresholds of a distributed Bragg reflector microcavity. Introducing a silver grating with variable gap sizes allows for a defect-induced lasing threshold control. The computation of the full time-resolved field dynamics of the cavity provides information on the involved lasing modes.

In dieser Arbeit werden planare plasmonische Schichtsysteme unter Verwendung der transparenten leitfähigen Oxide (TCOs) Zinkgalliumoxid (GZO) und Indiumzinnoxid (ITO) untersucht, die mittels Molekularstrahlepitaxie realisiert werden. Es wird gezeigt, dass solche hochdotierten Schichten aus GZO und ITO sich wie ein Drude-Metall mit einer einstellbaren Plasmafrequenz verhalten und Oberflächenplasmon-Polaritonen (SPPs) aufweisen, die über einen breiten NIR-Spektralbereich abstimmbar sind. Die TCOs können in mehreren Schichten mit unabhängig voneinander einstellbaren Dicken und Dotierungen der einzelnen Schichten gezüchtet werden. Diese abstimmbaren Mehrschichtstrukturen ermöglichen die Realisierung plasmonischer Konfigurationen, die für eine Vielzahl komplexer hybridisierter SPP-Zustände maßgeschneidert sind. Unter anderem wird unter Ausnutzung der Photon-Plasmon-Hybridisierung ein Stopped-Light-Resonator auf Basis von ITO demonstriert. Das Mehrschichtenregime kann zu einem Übergitter aus periodisch abwechselnd dotierten und undotierten TCO-Schichten erweitert werden, das ein hyperbolisches Metamaterial (HMM) darstellt. Die Parameter dieses HMM können nach Bedarf eingestellt werden, was HMMs mit einer maßgeschneiderten Zusammensetzung ihrer einzigartigen spektralen Permittivitätsintervalle ermöglicht. Mithilfe von GZO wird ein HMM in eine planare optische Mikrokavität monolitisch eingebettet. Dieser neuartige NIR-Resonator weist eine anomale Modendispersion auf, einschließlich einem Kontinuum von Moden hoher Ordnung und einer von der Resonatorlänge unabhängigen Mode nullter Ordnung, welche Subwellenlängen-Resonanzen ermöglichen können. Es wird gezeigt, dass die Mode nullter Ordnung bei einer Kavitätslänge deutlich unterhalb ihrer Wellenlänge fortbesteht und ihre Dispersion durch den Füllfaktor des HMM steuerbar ist. Die Ergebnisse stellen somit ein neues allgemeines Konzept für die Realisierung eines Subwellenlängenresonators auf der Basis eines abstimmbaren HMM dar. / In this work, planar, layered plasmonic systems utilizing the transparent conducting oxides (TCOs) zinc gallium oxide (GZO) and indium tin oxide (ITO) facilitated by molecular beam epitaxy are investigated. It is shown that such highly doped layers of GZO and ITO prepared with behave as a Drude metal with a tunable plasma frequency and feature surface plasmon polaritons (SPPs) that are tunable over a broad NIR spectral range. TCOs can be grown in the multilayer regime with independently adjusted thicknesses and doping levels of the individual layers. These tunable multilayer structures allow for the realization of plasmonic configurations tailored to support a variety of intricate hybridized SPP states. Particularly, exploiting photon-plasmon hybridization, a stopped-light cavity is demonstrated using highly doped ITO. The multilayer regime can be extended into a superlattice of periodically alternating doped and undoped TCO layers that constitutes a hyperbolic metamaterial (HMM). The parameters of such an HMM can be set on-demand, thus allowing HMMs with a tailored composition of its unique spectral permittivity intervals. Utilizing GZO, an HMM is embedded in a planar optical microcavity monolithically. This novel type of a NIR optical resonator exhibits an anomalous resonant mode dispersion, including features like a high-order mode continuum and a cavity size independent zeroth-order mode, which can enable subwavelength resonances. It is demonstrated that the zeroth-order mode persists at cavity sizes significantly below its wavelength and its dispersion can be controlled by the fill factor of the HMM. Thus, the results propose a novel general concept for the realization of a subwavelength resonator on the basis of a tunable HMM.

Les recherches que nous présentons dans ce mémoire s'inscrivent dans le cadre du développement de nouvelles structures et de l'étude de matériaux accordables en vue d'une intégration industrielle comme radôme actif.Plus particulièrement, ils consistent en la réalisation d'un dispositif micro-onde permettant à la fois un filtrage et une agilité fréquentiels en espace libre. Des structures basées sur des surfaces sélectives en fréquences, pour l'aspect filtrage, et sur des matériaux de type ferroélectrique, pour l'aspect accordabilité, sont développées. Des modélisations et des simulations électromagnétiques montrent que le changement de permittivité du matériau, obtenu par application d'un champ électrique externe, permet le pilotage fréquentiel de la transmission de la structure. Une mise en oeuvre expérimentale complète ces travaux, au cours de laquelle des prototypes ont été fabriqués par des techniques de photolithographie, puis caractérisés en espace libre grâce à un banc ABmm. Les mesures micro-ondes valident ainsi les résultats de simulations menées en amont et montrent les possibilités de contrôler la fréquence de transmission du radôme. / The research we present in this memory registers within the framework to develop new structures and to study tunable materials for an industrial integration as an active radome. Specifically, they consist of achieving a free space microwave device for both a filtering behaviour and a frequency agility behaviour. Structures based on frequency selective surfaces, for the filtering aspect, and on ferroelectric materials for the tuning aspect, are developed. Modeling and simulations show that the change of the material permittivity, obtained by applying an external electric field, enable piloting the transmission frequency of the structure. An experimental implementation complete this work and prototypes have been fabricated by photolithography techniques and then characterized in free space with a bench ABmm. Thus, microwave measurements validate the results of simulations and show the possibility to control the frequency transmission of the radome.

L’auto-assemblage de particules colloïdales est une technique polyvalente qui permet la fabrication de cristaux colloïdaux à de grandes échelles. Le but de notre étude est de développer des processus fiables et reproductibles pour fabriquer des matériaux photoniques et plasmoniques pouvant être incorporés au sein de différents dispositifs.Des opales inverses en dioxyde de titane composées d’un nombre précis de couches ont été intégrées au sein de cellules solaires à colorant «tout solide», ce qui a entraîné une amélioration des performances allant jusqu'à105%. Des surfaces d'ornano structurées présentant une absorption omnidirectionnelle et totale de la lumière ont été fabriquées par dépôt électrolytique d'or à travers une monocouche de particules de polystyrène. En outre, des surfaces d'or très rugueuses présentant des propriétés anti-réfléchissantes ont également été élaborées. En modulant la taille des interstices entre les particules de polystyrène, il a été possible de fabriquer par électrodéposition séquentielle des nanopiliers d’or de différentes longueurs. Enfin, l'utilisation d'une monocouche non compacte de particules comme moule a permis la réalisation de métamatériaux de type fishnet / The bottom-up self-assembly of colloidal particles is a versatile technique that allows the fabrication of large areas of colloidal crystals. The purpose of the present study is to develop highly reliable and reproducible process routes to fabricate nanostructured photonic and plasmonic materials that can be incorporated into different devices. Titania inverse opals with precise control of the layer thickness have been successfully incorporated into solid state DSSCs which showed improved performance of up to 105 %. Nanostructured gold surfaces that exhibited omnidirectional total light absorption have been fabricated by controlled electrodeposition of gold through colloidal monolayers of polystyrenebeads. In addition, very rough gold surfaces that showed anti-reflective properties were also made. By tuning the pore size of the colloidal monolayer, plasmonic gold nanopillarswith different lengths were fabricated by a sequential electrodeposition process. Using a non close-packed monolayer of PS beadscombined with electrodeposition,fishnet metamaterialswere fabricated.

Artificial magnetic materials (AMMs) are a type of metamaterials which are engineered to exhibit desirable magnetic properties not found in nature. AMMs are realized by embedding electrically small metallic resonators aligned in parallel planes in a host dielectric medium. In the presence of a magnetic field, an electric current is induced on the inclusions leading to the emergence of an enhanced magnetic response inside the medium at the resonance frequency of the inclusions. AMMs with negative permeability are used to develop single negative, or double negative metamaterials. AMMs with enhanced positive permeability are used to provide magneto-dielectric materials at microwave or optical frequencies where the natural magnetic materials fail to work efficiently. Artificial magnetic materials have proliferating applications in microwave and optical frequency region. Such applications include inversely refracting the light beam, invisibility cloaking, ultra miniaturizing and frequency bandwidth enhancing low profile antennas, planar superlensing, super-sensitive sensing, decoupling proximal high profile antennas, and enhancing solar cells efficiency, among others. AMMs have unique enabling features that allow for these important applications. Fundamental limitations on the performance of artificial magnetic materials have been derived. The first limitation which depends on the generic model of permeability functions expresses that the frequency dispersion in an AMM is limited by the desired operational bandwidth. The other constraints are derived based on the geometrical limitations of inclusions. These limitations are calculated based on a circuit model. Therefore, a formulation for permeability and magnetic susceptibility of the media based on a circuit model is developed. The formulation is in terms of a geometrical parameter that represents the geometrical characteristics of the inclusions such as area, perimeter and curvature, and a physical parameter that represents the physical, structural and fabrication characteristics of the medium. The effect of the newly introduced parameters on the effective permeability of the medium and the magnetic loss tangent are studied. In addition, the constraints and relations are used to methodically design artificial magnetic material meeting specific operational requirements. A novel design methodology based on an introduced analytical formulation for artificial magnetic material with desired properties is implemented. The synthesis methodology is performed in an iterative four-step algorithm. In the first step, the feasibility of the design is tested to meet the fundamental constraints. In consecutive steps, the geometrical and physical factors which are attributed to the area and perimeter of the inclusion are synthesized and calculated. An updated range of the inclusion's area and perimeter is obtained through consecutive iterations. Finally, the outcome of the iterative procedure is checked for geometrical realizability. The strategy behind the design methodology is generic and can be applied to any adopted circuit based model for AMMs. Several generic geometries are introduced to realize any combination of geometrically realizable area and perimeter (s,l) pairs. A realizable geometry is referred to a contour that satisfies Dido's inequality. The generic geometries introduced here can be used to fabricate feasible AMMs. The novel generic geometries not only can be used to enhance magnetic properties, but also they can be configured to provide specific permeability with desired dispersion function over a certain frequency bandwidth with a maximum magnetic loss tangent. The proposed generic geometries are parametric contours with uncorrelated perimeter and area function. Geometries are configured by tuning parameters in order to possess specified perimeter and surface area. The produced contour is considered as the inclusion's shape. The inclusions are accordingly termed Rose curve resonators (RCRs), Corrugated rectangular resonators (CRRs) and Sine oval resonators (SORs). Moreover, the detailed characteristics of the RCR are studied. The RCRs are used as complementary resonators in design of the ground plane in a microstrip stop-band filter, and as the substrate in design of a miniaturized patch antenna. The performance of new designs is compared with the counterpart devices, and the advantages are discussed.