The field of ambient desorption/ionization mass spectrometry (ADI-MS) has existed for over a decade. ADI-MS is a technique that offers benefits including fast analysis time, simple ionization sources that are easily constructed, and little to no required sample preparation. The research presented here describes efforts to better understand plasma-based ADI-MS sources and to explore the use of hydrogen-doped plasma gases with these sources. The use of hydrogen-doped argon (H2/Ar) and hydrogen-doped helium (H2/He) as plasma gases for a dielectric barrier discharge (DBD) and an AC glow discharge is presented first. When using the DBD, the intensity of the signal obtained when analyzing organic molecules in positive ion mode was increased by factors up to 37 times. In negative ion mode, only H2/Ar was shown to enhance the signal of an organic analyte. The limits of detection for caffeine when using hydrogen-doped plasma gases were found to decrease by factors of 78 and 1.9 for H2/Ar and H2/He respectively. The same phenomenon was observed when using H2/Ar with the AC discharge, but no signal enhancement was observed when using hydrogen-doped helium with the AC discharge. Similarly, if the DBD was allowed to ground through a wire rather than through the air, no signal enhancement was observed for H2/He. Using H2/Ar with metal samples is presented second. By using the metal sample as the grounded electrode for the AC glow discharge, many different metals could be detected directly with a time-of-flight mass spectrometer (TOF-MS) in the form of atomic ions both on their own and in combination with water and ammonia from the discharge. Any refractory metals tested did not yield signal. In addition to direct analysis with a TOF-MS, the AC discharge was used as a sampling method for an inductively coupled plasma mass spectrometer (ICP-MS). When coupled with an ICP-MS, the AC glow discharge was found capable of sampling even refractory elements, though the power of the ICP was required for ionization and detection. Scanning electron microscope (SEM) images of a copper surface exposed to the plasma discharge showed signs of melting when using the H2/Ar. Finally, a computer simulation of the chemistry and flow dynamics of a DC glow discharge generated in helium is presented. The simulation explores many of the fundamental processes at work and how they depend on the composition of the plasma gas. The generation of important species in the plasma was found to depend more on the amount of N2 and H2O impurities in the plasma gas rather than on the humidity or air pressure.

Les nanoparticules (NPs) d’oxyde de fer susceptibles de présenter un comportement superparamagnétique ont connu ces dernières années un intérêt considérable en vue de leur application en nanomédecine. Leurs propriétés magnétiques et biocompatibilités permettent notamment leur utilisation à des fins de diagnostic (IRM, imagerie optique et nucléaire…) et aussi de thérapie (hyperthermie, nano vectorisation…). L’objectif de cette thèse a été d’étudier l’influence des paramètres de synthèse sur les propriétés finales des NPs d’oxyde de fer magnétique dopé au zinc. Cette étude avait plus particulièrement pour but l’optimisation des méthodes de synthèse qui sont la coprécipitation et la décomposition thermique. A ce sujet, la caractérisation des NPs par diverses techniques a permis notamment d’étudier les liens entre la taille, la forme, la composition chimique d’une part, et les propriétés magnétiques des NPs d’autre part. Dans un deuxième temps, la fonctionnalisation des NPs qui est une étape indispensable pour assurer leurs biocompatibilités a été réalisée, elle était suivie par des mesures d’hyperthermie magnétique. / The superparamagnetic iron oxide nanoparticles (NPs) are a class of nanomaterials with a high interest in the nanomedicine field. Their magnetic properties and biocompatibility recommend them as potential candidates for diagnostics purposes (MRI, optical or nuclear Imaging ...) and therapy (hyperthermia, nanovectorization...). The aim of this thesis was to study the influence of the synthesis parameters on the final properties of magnetic zinc doped iron oxide nanoparticles. Two synthesis methods were considered, the co-precipitation and the thermal decomposition. The characterization of the obtained nanoparticles by complementary techniques allowed us to propose a consistent relationship between the size, shape and chemical composition on the one hand, and the magnetic properties of the nanoparticles on the other hand. The functionalization of NPs, that is a crucial step for ensuring their biocompatibility and use in magnetic hyperthermia, was also realised and the hyperthermia properties were measured on some typical nanoparticles.

La réalisation de céramiques transparentes de type Er:YAG pour application laser nécessite une transparence parfaite ce qui implique une grande qualité de la poudre utilisée et une parfaite maîtrise des procédés de fabrication. Afin d’obtenir une céramique transparente, la première partie de cette thèse a consisté à corriger le principal défaut de deux poudres de YAG expérimentales. Dans la première poudre, un taux de soufre élevé a été mesuré et l’objectif a été d’éliminer cette impureté par des traitements chimiques et thermiques, tout en gardant les caractéristiques structurales et granulométriques de la poudre de départ. La seconde poudre présentait un déficit en yttrium et le but a été de corriger ce déséquilibre par l’ajout d’yttrine. Dans un deuxième temps, afin de s’affranchir des problèmes de non-reproductibilité de la qualité des poudres commerciales de YAG, la possibilité d’obtenir des céramiques transparentes YAG par frittage réactif à partir de poudres d’alumine et d’yttrine a été étudiée. Lors de cette étude, le mélange, la stoechiométrie, la compaction, la densification et les transformations de phase ont été suivis dans le but de réaliser une carte de frittage de ce mélange. La dernière étude concerne l’obtention de céramiques transparentes à gradient de dopage suivant trois approches ayant pour point commun l’emploi de la technique de frittage SPS. La première a consisté en l’assemblage de céramiques déjà totalement densifiées, la deuxième, de céramiques pré-frittées et enfin, la dernière, d’un empilement de lits de poudres. Les mesures de diffusion des ions Erbium à travers l’interface ont permis de comparer ces différentes approches. / The realization of transparent Er:YAG ceramics for laser application requires a perfect transparency that implies a high quality of the used powder and a perfect control of the manufacturing processes. However, the quality of the starting powder is sometimes insufficient and its characteristics are not suitable in terms of stoichiometry, impurities or particle morphology. In this case, a pre-treatment of the powder and the use of sintering aids are necessary to obtain transparency. In order to prepare transparent ceramics, the first part of this work consisted in correcting the main defects of two experimental YAG powders. In the first powder, a high level of sulfur was measured and the objective was to eliminate this impurity by chemical and thermal treatments, while keeping the structural characteristics and particle size of the starting powder. In the second powder, the measured stoichiometry showed an yttrium deficiency of 5.3 mol% and the purpose was to correct the Y/Al ratio by addition of yttria. In a second part, in order to overcome the problems of non-reproducibility of the quality of YAG commercial powders, the possibility of obtaining YAG transparent ceramics by reactive sintering from alumina and yttria powders was investigated. The last part of this study concerned the development of transparent ceramics with doping gradients by three approaches having in common the use of SPS sintering. The first involved the assembly of fully dense ceramics; the second, pre-sintered ceramics and finally, the last approach a stack of powder layers. The measurement of Erbium ion diffusion through the interface made it possible to compare these different approaches.

The photovoltaic properties of CdTe-based thin films depend on recombination levels formed in the CdTe layer and at the heterojunction. The localized states are resultant of structural defects (metal sublattice, chalcogen sublattice, interstitial), controlled doping, deposition process, and/or post-deposition annealing. The photoluminescence study of CdTe thin films, from both the bulk and heterojunction, can reveal radiative states due to different defects or impurities. Identification of defects allows for potential explanation of their roles and influence on solar cell performance. A thorough understanding of the material properties responsible for solar cell performance is critical in further advancing the efficiency of devices. The presented work is a systematic investigation using photoluminescence to study CdTe thin films with varying deposition processes. The thin (polycrystalline) films explored in this study were deposited by either the elemental vapor transport technique (EVT) or close spaced sublimation (CSS). Two device architectures were investigated, the typical CdTe/CdS device and the CdSeXTe1-X (CST) alloy device. Post-deposition annealing processes were either laser or thermal. The study of the CdTe thin films is grouped in three general categories: (a) EVT films: Intrinsic and Extrinsic (Group V: Sb and P), (b) CST alloys, and (c) Post-deposition Laser Annealed (LA) films. The main goal of this dissertation is to understand the influence of fabrication procedures (deposition conditions, post deposition thermal and chemical treatments, added impurities, and device architecture) on the defect structure of the CdTe thin films. The behavior of the photoluminescence (PL), studied as a function of the measurement temperature and excitation intensity, provides insight to the mechanism causing the radiative recombination levels. Analysis of the PL spectra for CdTe films with intrinsic doping demonstrated stoichiometric control of native defects for both the Cd- and Te-rich conditions. PL spectra of CdTe:Sb films showed unique Sb-related bands. Also, impurity-related defects were identified in the CdTe:P spectra. Spectral analysis support the need for optimization of dopant concentration. The effects of selenium (Se) thickness and post-deposition processing on the formation of CST alloy were demonstrated in the changing PL spectra. The native defects (and complexes) identified in films with thermal anneal processing were the same as those identified in films with laser anneal post-deposition processing. The PL data were collected and other characterization techniques were used to support the defect assignments. A repository of material properties, which include the recombination levels along with structural defect assignment for each of the CdTe deposition processes, is provided. This project will lend the solar cell community information on CdTe defects for different processing conditions, ultimately influencing the fabrication of improved solar cells.

Le couplage direct de la séparation et de la photo-catalyse en utilisant des membranes à base de dioxyde de titane, est une approche intéressante habituellement appliquée dans les dispositifs de traitement de l'eau, et récemment envisagée pour d’autres applications, telle que la production d’hydrogène par photo-électrolyse de l’eau. En effet, le dioxyde de titane (TiO2) est bien connu pour ses propriétés photo-catalytiques. En outre, s’il est immobilisé sur support membranaire plutôt qu’utilisé en suspension, son intégration en procédé de séparation est facilitée, sans compter les gains apportés au procédé en termes de compacité, d’intégrité et de capacité séparative. Pour une telle application, des cellules originales sous forme de multicouches sont requises. Certains systèmes sont décrits dans la littérature mais aucun d’entre eux n’est réellement intégré (c’est-à-dire basé sur une géométrie de type multicouche micro-architecturée), ni formé de couches minces obtenus par procédés plasma. Or les procédés plasma sont généralement compétitifs pour l’obtention de systèmes multicouches de hautes intégrité et compacité. Dans le cadre de récents travaux menés à l’IEM, différents types de couches minces ont été préparés par PECVD (Plasma Enhanced Chemical Vapor Deposition), à savoir des films de TiO2 connus pour leurs propriétés photo-catalytiques et des membranes phosphoniques de conduction protonique avérée. En outre, des films minces de platine efficaces pour la réduction catalytique des protons en hydrogène peuvent être également déposés par un autre procédé plasma, la pulvérisation cathodique. Au cours de ce travail de thèse, des films de TiO2 obtenus par PECVD Basse Fréquence sont optimisés en termes d’activité photo-catalytique et de propriétés séparatives; cette optimisation, qui concerne le dopage à l’azote du TiO2 (permettant le déplacement de la bande interdite de la région UV vers la région visible), est le premier objectif de ce projet de thèse. Les films minces sont caractérisés du point de vue de leurs propriétés structurales et fonctionnelles. Le second objectif de la thèse est de montrer l’intérêt de ces films de TiO2 dans la production/séparation d’hydrogène par voie solaire. Dans ce but, la photo-activité des films dans le noir, sous UV et sous visible est étudiée dans une cellule mono-compartiment où les deux électrodes baignent dans un électrolyte liquide. Des études électrochimiques plus poussées en présence d’une membrane électrolyte commerciale et d’une cathode de platine (dont les caractérisations en propre sont portées en annexes de ce travail), sont aussi abordées. Le dernier objectif de cette thèse est le transfert de la technologie des procédés plasma de l’Institut Européen des Membranes de l’Université de Montpellier vers le Laboratoire Chimie-Physique des Matériaux de l’Université Libanaise. Les détails de l’installation du réacteur au Liban font l’objet du dernier chapitre de la thèse ainsi que les résultats des premiers tests de dépôt sur la base de conditions opératoires précédemment optimisées à l’Institut Européen des Membranes. / Direct coupling of separation and photo-catalysis using membranes based on titanium dioxide, is an interesting approach usually applied in water treatment devices, and recently considered for other applications, such as hydrogen production by water photo-electrolysis. Indeed, titanium dioxide (TiO2) is well-known for its photo-catalytic properties. In addition, if it is immobilized on membrane supports rather than used in suspensions, its integration in the separation process is facilitated and some advantages of the process in terms of compactness, integrity and separation capacity are provided. For such an application, original multilayered cells are required. Some systems are described in the literature but none of them is truly integrated (that is to say based on a micro-architecture geometry of multi-layer type) or formed of thin layers obtained by plasma processes. Now plasma processes are generally competitive for obtaining multilayered systems with high integrity and compactness. As part of recent works at IEM, various types of thin films were prepared by PECVD (Plasma Enhanced Chemical Vapor Deposition) to include TiO2 films known for their photo-catalytic properties and phosphonic acid membranes with average protons conductivity. In addition, effective platinum thin films for the protons catalytic reduction into hydrogen could also be deposited by another plasma process, sputtering. In this work, TiO2 films obtained by Low Frequency PECVD are optimized in terms of photo-catalytic activity and separation properties; this optimization, regarding the nitrogen doping of TiO2 (for the band gap shifting from the UV region to the visible region), is the first objective of this thesis project. The thin films structural and functional properties are characterized.The second aim of this thesis is to demonstrate the competitiveness of these films for the Hydrogen production/separation by solar energy. To this end, the layers photo-response has been tested in the dark, under UV and under visible light in a mono-compartment cell where both electrodes are immersed in a liquid electrolyte. Further studies integrating the TiO2 layers in contact with a commercial electrolyte membrane and a platinum counter-electrode (whose characterizations are presented in annexes), are also performed. The last aim of this work is the Plasma technology transfer from the European Membrane Institute of University of Montpellier to the Laboratory of Physical Chemistry of Materials of Lebanese University. The installation and configuration details are presented in the last chapter as well as the results of the first depositions based on operating conditions already optimized at European Membrane Institute.

In science and technology there is a steadily increased demand of new materials and new materials production processes since they create new application areas as well as improved production technology and economy. This thesis includes development and studies of a chemical vapour deposition (CVD) process for growth of thin films of the metastable material copper nitride, Cu3N, which is a semiconductor and decomposes at around 300 oC. The combination of these properties opens for a variety of applications ranging from solar cells to sensor and information technology. The CVD process developed is based on a metal-organic compound copper hexafluoroacetylacetonate, Cu(hfac)2 , ammonia and water and was working at about 300 oC and  5 Torr. It was found that a small amount of water in the vapour increased the growth rate considerably and that the phase content, film texture, chemical composition and morphology were strongly dependent on the deposition conditions. In-situ oxygen doping during the CVD of Cu3N to an amount of 9 atomic % could also be accomplished by increasing the water concentration in the vapour. Oxygen doping increases the band gap of the material as well as the electrical resistivity and changes the stability. The crystal structure of Cu3N is very open and contains several sites which can be used for doping. Different spectroscopic techniques like X-ray photoelectron spectroscopy, Raman spectroscopy and near edge X-ray absorption fine structure spectroscopy were used to identify the oxygen doping site(s) in Cu3N. Besides the properties, the oxygen doping also affected the morphology and texture of the films. By combining thin layers of different materials several properties can be optimized at the same time. It has been demonstrated in this thesis that multilayers, composed of alternating Cu3N and Cu2O layers, i.e. a metastable and a stable material, could be grown by CVD technique. However, the stacking sequence affected the texture, morphology and chemical composition. The interfaces between the different layers were sharp and no signs of decomposition of the initially deposited metastable Cu3N layer could be detected.

The underlying motivation for the work carried out for this thesis was the growing need for more sustainable technologies. The aim was to synthesize a “palette” of functional nanomaterials using the established technique of hydrothermal carbonization (HTC). The incredible diversity of HTC was demonstrated together with small but steady advances in how HTC can be manipulated to tailor material properties for specific applications. Two main strategies were used to modify the materials obtained by HTC of glucose, a model precursor representing biomass. The first approach was the introduction of heteroatoms, or “doping” of the carbon framework. Sulfur was for the first time introduced as a dopant in hydrothermal carbon. The synthesis of sulfur and sulfur/nitrogen doped microspheres was presented whereby it was shown that the binding state of sulfur could be influenced by varying the type of sulfur source. Pyrolysis may additionally be used to tune the heteroatom binding states which move to more stable motifs with increasing pyrolysis temperature. Importantly, the presence of aromatic binding states in the as synthesized hydrothermal carbon allows for higher heteroatom retention levels after pyrolysis and hence more efficient use of dopant sources. In this regard, HTC may be considered as an “intermediate” step in the formation of conductive heteroatom doped carbon. To assess the novel hydrothermal carbons in terms of their potential for electrochemical applications, materials with defined nano-architectures and high surface areas were synthesized via templated, as well as template-free routes. Sulfur and/or nitrogen doped carbon hollow spheres (CHS) were synthesized using a polystyrene hard templating approach and doped carbon aerogels (CA) were synthesized using either the albumin directed or borax-mediated hydrothermal carbonization of glucose. Electrochemical testing showed that S/N dual doped CHS and aerogels derived via the albumin approach exhibited superior catalytic performance compared to solely nitrogen or sulfur doped counterparts in the oxygen reduction reaction (ORR) relevant to fuel cells. Using the borax mediated aerogel formation, nitrogen content and surface area could be tuned and a carbon aerogel was engineered to maximize electrochemical performance. The obtained sample exhibited drastically improved current densities compared to a platinum catalyst (but lower onset potential), as well as excellent long term stability. In the second approach HTC was carried out at elevated temperatures (550 °C) and pressure (50 bar), corresponding to the superheated vapor regime (htHTC). It was demonstrated that the carbon materials obtained via htHTC are distinct from those obtained via ltHTC and subsequent pyrolysis at 550 °C. No difference in htHTC-derived material properties could be observed between pentoses and hexoses. The material obtained from a polysaccharide exhibited a slightly lower degree of carbonization but was otherwise similar to the monosaccharide derived samples. It was shown that in addition to thermally induced carbonization at 550 °C, the SHV environment exhibits a catalytic effect on the carbonization process. The resulting materials are chemically inert (i.e. they contain a negligible amount of reactive functional groups) and possess low surface area and electronic conductivity which distinguishes them from carbon obtained from pyrolysis. Compared to the materials presented in the previous chapters on chemical modifications of hydrothermal carbon, this makes them ill-suited candidates for electronic applications like lithium ion batteries or electrocatalysts. However, htHTC derived materials could be interesting for applications that require chemical inertness but do not require specific electronic properties. The final section of this thesis therefore revisited the latex hard templating approach to synthesize carbon hollow spheres using htHTC. However, by using htHTC it was possible to carry out template removal in situ because the second heating step at 550 °C was above the polystyrene latex decomposition temperature. Preliminary tests showed that the CHS could be dispersed in an aqueous polystyrene latex without monomer penetrating into the hollow sphere voids. This leaves the stagnant air inside the CHS intact which in turn is promising for their application in heat and sound insulating coatings. Overall the work carried out in this thesis represents a noteworthy development in demonstrating the great potential of sustainable carbon materials. / Das Ziel der vorgelegten Arbeit war es, mit Hilfe der Hydrothermalen Carbonisierung (HTC) eine Palette an verschiedenen Materialien herzustellen, deren physikalische und chemische Eigenschaften auf spezifische Anwendungen zugeschnitten werden können. Die Motivation hierfür stellt die Notwendigkeit, Alternativen zu Materialien zu finden, die auf fossilen Brennstoffen basieren. Dabei stellen vor allem nachhaltige Energien eine der größten Herausforderungen der Zukunft dar. HTC ist ein mildes, nachhaltiges Syntheseverfahren welches prinzipiell die Nutzung von biologischen Rohstoffen (z. B. landwirtschaftlichen Abfallprodukten) für die Herstellung von wertvollen, Kohlenstoff-basierten Materialien erlaubt. Es wurden zwei verschiedene Ansätze verwendet, um hydrothermalen Kohlenstoff zu modifizieren. Zum einen wurde HTC unter „normalen“ Bedingungen ausgeführt, d. h. bei 180 °C und einem Druck von etwa 10 bar. Der Zucker Glukose diente in allen Fällen als Kohlenstoff Vorläufer. Durch Zugabe von stickstoff und /oder schwefelhaltigen Additiven konnte dotierte Hydrothermalkohle hergestellt werden. Dotierte Kohlenstoffe sind bereits für ihre positiven Eigenschaften, wie verbesserte Leitfähigkeit oder erhöhte Stabilität, bekannt. Zusätzlich zu Stickstoff dotierter Hydrothermalkohle, die bereits von anderen Gruppen hergestellt werden konnte, wurde in dieser Arbeit zum ersten Mal Schwefel in Hydrothermalkohle eingebaut. Außerdem wurden verschiedene Ansätze verwendet, um Oberfläche und definierte Morphologie der dotierten Materialien zu erzeugen, welche wichtig für elektrochemische Anwendungen sind. Schwefel- und/oder stickstoffdotierte Kohlenstoff Nanohohlkugeln sowie Kohlenstoff Aerogele konnten hergestellt werden. Mit Hilfe von einem zusätzlichen Pyrolyseschritt (d. h. Erhitzen unter Schutzgas) konnte die Leitfähigkeit der Materialien hergestellt werden, die daraufhin als Nichtmetall-Katalysatoren für Wasserstoff-Brennstoffzellen getestet wurden. Im zweiten Ansatz wurde HTC unter extremen Bedingungen ausgeführt, d. h. bei 550 °C und einem Druck von ca. 50 bar, welches im Wasser Phasendiagram dem Bereich des Heißdampfes entspricht. Es konnte gezeigt werden, dass die so erhaltene Hydrothermalkohle ungewöhnliche Eigenschaften besitzt. So hat die Hochtemperatur-Hydrothermalkohle zwar einen hohen Kohlenstoffgehalt (mehr als 90 Massenprozent), enthält aber auch viele Wasserstoffatome und ist dadurch schlecht leitfähig. Da damit elektrochemische Anwendungen so gut wie ausgeschlossen sind, wurde die Hochtemperatur-Hydrothermalkohle für Anwendungen vorgesehen, welche chemische Stabilität aber keine Leitfähigkeit voraussetzen. So wurden beispielsweise Hochtemperatur-Kohlenstoff-Nanohohlkugeln synthetisiert, die großes Potential als schall- und wärmeisolierende Additive für Beschichtungen darstellen. Insgesamt konnten erfolgreich verschiedenste Materialien mit Hilfe von HTC hergestellt werden. Es ist zu erwarten, dass sie in Zukunft zu nachhaltigen Technologien und damit zu einem weiteren Schritt weg von fossilen Brennstoffen beitragen werden.

This study focuses on the investigation of the key parameters that determine the optical and electrical characteristics of inverted top-emitting organic light emitting diodes (OLED). A co-deposition of small molecules in vacuum is used to establish electrically doped films that are applied in n-i-p layered devices. The knowledge about the functionality of each layer and parameter is important to develop efficient strategies to reach outstanding device performances. In the first part, the thin film optics of top-emitting OLEDs are investigated, focusing on light extraction via cavity tuning, external outcoupling layers (capping layer), and the application of microlens films. Optical simulations are performed to determine the layer configuration with the maximum light extraction efficiency for monochrome phosphorescent devices. The peak efficiency is found at 35%, while varying the thickness of the charge transport layers, the semitransparent anode, and the capping layer simultaneously. Measurements of the spatial light distribution validate, that the capping layer influences the spectral width and the resonance wavelength of the extracted cavity mode, especially for TM polarization. Further, laminated microlens films are applied to benefit from strong microcavity effects in stacked OLEDs by spatial mixing of external and to some extend internal light modes. These findings are used to demonstrate white top-emitting OLEDs on opaque substrates showing power conversion efficiencies up to 30 lm/W and a color rendering index of 93, respectively. In the second part, the charge carrier management of n-i-p layered diodes is investigated as it strongly deviates from that of the p-i-n layered counterparts. The influence of the bottom cathode material and the electron transport layer is found to be negligible in terms of driving voltage, which means that the assumption of an ohmic bottom contact is valid. The hole transport and the charge carrier injection at the anode is much more sensitive to the evaporation sequence, especially when using hole transport materials with a glass transition temperature below 100°C. As a consequence, thermal annealing of fabricated inverted OLEDs is found to drastically improve the device electronics, resulting in lower driving voltages and an increased internal efficiency. The annealing effect on charge transport comes from a reduced charge accumulation due to an altered film morphology of the transport layers, which is proven for electrons and for holes independently. The thermal treatment can further lead to a device degradation. Finally, the thickness and the material of the blocking layers which usually control the charge confinement inside the OLED are found to influence the recombination much more effectively in inverted OLEDs compared to non-inverted ones.

Failure analysis and optimization of semiconducting devices request knowledge of their electrical properties. To meet the demands of today’s semiconductor industry, an electrical nanometrology technique is required which provides quantitative information about the doping profile and which enables scans with a lateral resolution in the sub-10 nm range. In the presented work it is shown that Kelvin probe force microscopy (KPFM) is a very promising electrical nanometrology technique to face this challenge. The technical and physical aspects of KPFM measurements on semiconductors required for the correct interpretation of the detected KPFM bias are discussed. A new KPFM model is developed which enables the quantitative correlation between the probed KPFM bias and the dopant concentration in the investigated semiconducting sample. Quantitative dopant profiling by means of the new KPFM model is demonstrated by the example of differently structured, n- and p-type doped silicon. Additionally, the transport of charge carriers during KPFM measurements, in particular in the presence of intrinsic electric fields due to vertical and horizontal pn junctions as well as due to surface space charge regions, is discussed. Detailed investigations show that transport of charge carriers in the semiconducting sample is a crucial aspect and has to be taken into account when aiming for a quantitative evaluation of the probed KPFM bias.

<p>When the amorphous silicon (a-Si) dangling bonds are bonded to hydrogen the concentration of the dangling bond is decreased. The resulting film is called hydrogenated amorphous silicon (a-Si:H). The reduction in the dangling bonds concentration improves the optoelectrical properties of the film. The improved properties of a-Si:H makes it possible to manufacture electronic devices including a solar cell. A solar cell device based on the hydrogenated amorphous silicon (a-Si:H) was fabricated using the Hot-Wire Chemical Vapour Deposition (HWCVD). When an n-i-p solar cell configuration is grown, the norm is that the p-doped layer is deposited from a mixture of silane (SiH4) gas with diborane (B2H6). The boron atoms from diborane bonds to the silicon atoms and because of the number of the valance electrons, the grown film becomes a p-type film. Aluminium is a group 3B element and has the same valence electrons as boron, hence it will also produce a p-type film when it bonds with silicon. In this study the p-doped layer is grown from the co-deposition of a-Si:H from SiH4 with aluminium evaporation resulting in a crystallized, p-doped thin film. When this thin film is used in the n-i-p cell configuration, the device shows photo-voltaic activity. The intrinsic layer and the n-type layers for the solar cell were grown from SiH4 gas and Phosphine (PH3) gas diluted in SiH4 respectively. The individual layers of the solar cell device were characterized for both their optical and electrical properties. This was done using a variety of experimental techniques. The analyzed results from the characterization techniques showed the films to be of device quality standard. The analysed results of the ptype layer grown from aluminium showed the film to be successfully crystallized and doped. A fully functional solar cell was fabricated from these layers and the cell showed photovoltaic activity.<br /> &nbsp / </p>