<div> <div> <div> <p>Transient liquid phase sintering (TLPS) technologies are potential low-temperature solders for sustainable replacements of lead-based solders and high-temperature lead-free solders. Compared to solid-state sintering and lead-free solders, TLPS uses lower temperatures and is, thus, suitable for assembling temperature-sensitive components. TLPS is a non- equilibrium process and determining the kinetics is critical to the estimation of processing times needed for good joining. The tin-indium (Sn-In) system with a eutectic temperature of 119°C is being considered as the basis for a TLPS system when combined with tin. Most models of TLPS include interdiffusion, dissolution, isothermal solidification, and homogenization and are based on simple binary alloys without intermediate phases. The Sn-In system has two intermediate phases and thus the reaction kinetics require additional terms in the modeling. Differential Scanning Calorimetry (DSC) has been used to measure the response of Sn-In alloys during the transient liquid phase reaction. Preparation of tin indium alloys for microstructural analysis is challenging due to their very low hardness. This study uses freeze-fracturing of the tin indium alloys to obtain sections for microstructural analysis. The combination of DSC and microstructure analysis provides information on the reaction kinetics. It was observed that the solid/liquid reaction does not proceed as quickly as desired, that is, substantial liquid remains after annealing even though the overall composition is in the single-phase region in the phase diagram. </p> </div> </div> </div>

Advances in wide-bandgap semiconductor devices have increased the allowable operating temperature of power electronic systems. High-temperature devices can benefit applications such as renewable energy, electric vehicles, and space-based power electronics that currently require bulky cooling systems for silicon power devices. Cooling systems can typically be reduced in size or removed by adopting wide-bandgap semiconductor devices, such as silicon carbide. However, to do this, semiconductor device packaging with high reliability at high temperatures is necessary. Transient liquid phase (TLP) die-attach has shown in literature to be a promising bonding technique for this packaging need. In this work TLP has been comprehensively investigated and characterized to assess its viability for high-temperature power electronics applications. The reliability and durability of TLP die-attach was extensively investigated utilizing electrical resistivity measurement as an indicator of material diffusion in gold-indium TLP samples. Criteria of ensuring diffusive stability were also developed. Samples were fabricated by material deposition on glass substrates with variant Au–In compositions but identical barrier layers. They were stressed with thermal cycling to simulate their operating conditions then characterized and compared. Excess indium content in the die-attach was shown to have poor reliability due to material diffusion through barrier layers while samples containing suitable indium content proved reliable throughout the thermal cycling process. This was confirmed by electrical resistivity measurement, EDS, FIB, and SEM characterization. Thermal and mechanical characterization of TLP die-attached samples was also performed to gain a newfound understanding of the relationship between TLP design parameters and die-attach properties. Samples with a SiC diode chip TLP bonded to a copper metalized silicon nitride iv substrate were made using several different values of fabrication parameters such as gold and indium thickness, Au–In ratio, and bonding pressure. The TLP bonds were then characterized for die-attach voiding, shear strength, and thermal impedance. It was found that TLP die-attach offers high average shear force strength of 22.0 kgf and a low average thermal impedance of 0.35 K/W from the device junction to the substrate. The influence of various fabrication parameters on the bond characteristics were also compared, providing information necessary for implementing TLP die-attach into power electronic modules for high-temperature applications. The outcome of the investigation on TLP bonding techniques was incorporated into a new power module design utilizing TLP bonding. A full half-bridge inverter power module for low-power space applications has been designed and analyzed with extensive finite element thermomechanical modeling. In summary, TLP die-attach has investigated to confirm its reliability and to understand how to design effective TLP bonds, this information has been used to design a new high-temperature power electronic module.

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Inkjet-printing of graphene is a desirable additive-manufacturing process for rapid-prototyping and centers around the readily scalable process of liquid-phase exfoliation of graphene. Unfortunately, most common solvents for this process such as N-methyl-2-pyrrolidone (NMP) or cyclohexanone/terpineol (C/T) are toxic. Dihydrolevoglucosenone, commonly known as Cyrene, is a renewable and fully biodegradable non-toxic solvent that represents an ideal alternative. Here, we demonstrate the potential of Cyrene-based graphene inks through few-layer inkjet printing on flexible substrates to produce non-toxic conductors a strain-mediated mechanism for biosensing. These strain-sensors were used to detect bodily motion for wearable electronics, where gel-based, wet-electrodes are a common feature within the broader class of sensors used in electromyography (EMG). The environmentally friendly and non-toxic nature of this solvent has promise not only for wearables, but also in agricultural and food industries where sensors need to be safe for potential contacts made to food supplies. Moreover, it has demonstrated superior suspension of graphene flakes compared to traditional solvents.

Mit der vorliegenden Arbeit wird das Wachstum von polykristallinem Silicium auf Glas bei niedrigen Temperaturen aus metallischen Lösungen in einem Zweistufenprozess untersucht. Im ersten Prozessschritt werden nanokristalline Siliziumschichten (nc-Si) hergestellt, entweder durch die direkte Abscheidung auf geheizten Substraten oder durch als ''Amorphous-Liquid-Crystalline''(ALC)-Umwandlung bezeichnete metall-induzierte Kristallisation. Im zweiten Prozessschritt dienen die Saatschichten als Vorlage für das Wachstum von deutlich größeren Kristalliten durch stationäre Lösungszüchtung. Die ALC-Prozessdauer konnte durch umfassende Parameterstudien signifikant reduziert werden. Die Charakterisierung der durch direkte Abscheidung auf geheizten Substraten entstehenden nc-Si Saatschichten offenbarte, dass es sich dabei um individuelle Saatkörner handelt, die in eine quasi-amorphe Matrix eingebettet sind. Die Oxidation der Saatschichten vor dem zweiten Prozessschritt wurde als ein wesentliches Hindernis für das Wachstum identifiziert. Als erfolgreichste Lösung zur Überwindung dieses Problems hat sich ein anfänglicher Rücklöseschritt erwiesen. Da diese Methode jedoch schwierig zu kontrollieren ist, wurde ein UV-Laser-System entwickelt und installiert. Erste Resultate zeigen epitaktisches Wachstum an den Stellen, an denen das Oxid entfernt wurde. Bei der Lösungszüchtung auf ALC-Schichten beginnt das Wachstum an einigen größeren Saatkristallen, von wo aus umliegende Gebiete lateral überwachsen werden. Obwohl Kristallitgrößen bis zu 50 Mikrometern erreicht wurden, war es noch nicht möglich, geschlossene Schichten zu erzielen. Durch Lösungszüchtung auf nc-Si Saatschichten hingegen konnte dieses Ziel erreicht werden. Geschlossene, polykristalline Si-Schichten wurden erzeugt, auf denen alle Si-Kristallite miteinander verbunden sind. Neben den Wachstumsexperimenten wurden 3D-Simulationen durchgeführt, in denen u.a. unterschiedliche Heizerkonfigurationen simuliert wurden. / The subject of this thesis is the investigation of the growth of polycrystalline silicon on glass at low temperatures from metallic solutions in a two-step growth process. In the first process step, nanocrystalline Si (nc-Si) films are formed either by direct deposition on heated substrates, or by a metal-induced crystallization process, referred to as amorphous-liquid-crystalline (ALC) transition. In the second process step, these seed layers serve as templates for the growth of significantly larger Si crystallites by means of steady-state solution growth. Extensive parameter studies for the ALC process helped to bring down the process duration significantly. Characterization of the nc-Si seed layers, formed by direct deposition on heated substrates, showed that the layer is composed of individual seeds, embedded in a quasi-amorphous matrix. The oxidation of the seed layers prior to the second process step was found to be a major obstacle. The most successful solution has been an initial melt-back step. As the process is hard to control, though, a UV laser system has been developed and installed. First promising results show unobstructed epitaxial growth where the oxide has been removed. Steady-state solution growth on ALC seed layers was found to start from a few larger seed crystals, and then cover the surrounding areas by lateral overgrowth. Although crystallites with sizes of up to 50 micrometers were obtained, it was not yet possible to achieve full surface coverage with a continuous layer. By solution growth on nc-Si seed layers, however, it was eventually possible to achieve this goal. Continuous, polycrystalline Si layers were grown, on which all Si crystallites are interlocked. The growth experiments were accompanied by 3D simulations, in which e.g. different heater configurations have been simulated.

Lasers find a wide range of applications in many areas including photo-biology, photo-chemistry, materials processing, imaging and telecommunications. However, the practical use of such sources is often limited by the bulky nature of existing systems. By fabricating channel waveguides in solid-state laser-gain materials more compact laser systems can be designed and fabricated, providing user-friendly sources. Other advantages inherent in the use of waveguide gain media include the maintenance of high intensities over extended interaction lengths, reducing laser thresholds. This thesis presents the development of Yb:tungstate lasers operating around 1μm in waveguide geometries. An Yb:KY(WO₄)₂ planar waveguide laser grown by liquid phase epitaxy is demonstrated with output powers up to 190 mW and 76 % slope efficiency. This is similar to the performance from bulk lasers but in a very compact design. Excellent thresholds of only 40 mW absorbed pump power are realised. The propagation loss is found to be less than 0.1 dBcm⁻¹ and Q-switched operation is also demonstrated. Channel waveguides are fabricated in Yb:KGd(WO₄)₂ and Yb:KY(WO₄)₂ using ultrafast laser inscription. Several of these waveguides lase in compact monolithic cavities. A maximum output power of 18.6 mW is observed, with a propagation loss of ~2 dBcm⁻¹. By using a variety of writing conditions the optimum writing pulse energy is identified. Micro-spectroscopy experiments are performed to enable a fuller understanding of the induced crystal modification. Observations include frequency shifts of Raman lines which are attributed to densification of WO₂W bonds in the crystal. Yb:tungstate lasers can generate ultrashort pulses and some preliminary work is done to investigate the use of quantum dot devices as saturable absorbers. These are shown to have reduced saturation fluence compared to quantum well devices, making them particularly suitable for future integration with Yb:tungstate waveguides for the creation of ultrafast, compact and high repetition rate lasers.

La thèse porte sur l’étude de la cinétique de Smart Cut™ dans du silicium après implantation hydrogène, pour des températures de recuit comprises entre 500°C et 1300°C. Ainsi, la cinétique de séparation de couches (splitting) est caractérisée en considérant des recuits dans un four à moufle ainsi que des recuits laser. Sur la base de cette caractérisation, un modèle physique, basé sur le comportement de l’hydrogène implanté durant le recuit, est proposé. Le modèle s’appuie sur des caractérisations SIMS de l’évolution de la concentration d’hydrogène durant le recuit, ainsi que sur des simulations numériques. Le modèle propose une explication aux propriétés des films obtenus en fonction des conditions de recuit et mesurées par microscopie optique, AFM ainsi que par des mesures des énergies d’interfaces. Sur la base du modèle de splitting obtenu, deux procédés de fabrication de films de silicium sont proposés pour l’élaboration de matériaux de silicium sur saphir et verre par recuit laser ainsi que pour l’élaboration de feuilles de silicium monocristallin par épitaxie en phase liquide sur substrat silicium implanté. L’étude de premier procédé prouve pour la première fois la possibilité d’appliquer le procédé Smart Cut™ sur des substrats de silicium implanté. Les films ainsi obtenus présentent des grandes surfaces de transfert (wafer de 200 mm), ce qui présente un grand intérêt industriel. L’étude propose différentes caractérisations des films obtenus (AFM, profilométrie optique, mesure 4 pointe). Le deuxième procédé est démontré en utilisant des bancs d’épitaxie en phase liquide de silicium (température supérieure à 1410°C) afin d’effectuer des dépôts sur des substrats de silicium implantés. Les films obtenus montrent un grand degré de croissance épitaxiale (jusqu’à 90% du film déposé mesuré par EBSD) et présentent une épaisseur aussi faible que 100 µm. D’autre part, le détachement par Smart Cut™ des films ainsi déposés est démontré. / At first, the thesis studies the kinetics of Smart Cut™ in silicon implanted with hydrogen ions for annealing temperature in the range 500°C-1300°C. The kinetics is characterized by using a specially-dedicated furnace and by considering laser annealing. Based on the related characterization and observations, a physical model is established based on the behavior of implanted hydrogen during annealing. The model is strengthened by SIMS characterization focused on the evolution of hydrogen during annealing and on numerical calculations. Additionally, the model proposes an explanation for the properties of the obtained films as a function of the annealing conditions, based on optical microscope and AFM observations and bonding energy characterization. Based on this splitting model, two innovative processes for fabrication of silicon films are proposed. The first process allows to produce films of silicon on sapphire and films of silicon on glass by considering a laser annealing. The second produces foils of monocrystalline silicon by liquid phase epitaxial growth on implanted silicon substrate. The study of the first process proves for the first time the possibility to apply the Smart Cut™ for substrates of implanted silicon. The resulting films present large surface of transferred films (up to 200 mm wafers), which is very interesting in an industrial perspective. The study proposes different characterization of the films obtained by this process (AFM, optical profilometry and 4 probe measurement). The second process is demonstrated by using a chamber of liquid phase epitaxial growth of silicon (deposition temperature superior to 1410°C) in order to deposit liquid silicon on implanted silicon substrates. The obtained films show a high degree of epitaxial growth (up to 90% of the film as characterized by EBSD) and show a thickness as low as 100µm. Additionally the detachment by Smart Cut of the deposited films is demonstrated.

<p>A new kind of lipid/polymer composite particle, consisting of a biodegradable polymer matrix with well-defined lipid domains, has been created. The lipid used is the water-swelling lipid monoolein (MO), which forms a reversed bicontinuous cubic diamond structure in aqueous solutions. The polymer is poly(d,l-lactide-co-glycolide) (PLG), which degrades into water-soluble monomers through hydrolysis. This new particle might be a good alternative for encapsulation of active substances intended to be released over a longer period of time, i.e. sustained/retained/controlled release.</p><p>To prepare such particles can be difficult. Suitable phase behaviour and a solvent with the right properties are needed. For this reason, the phase behaviours of several different lipid/polymer/solvent/water systems have been explored. From the phase behaviour of a suitable system (i.e. MO/PLG/ethyl acetate/water), a route for formation of lipid/polymer composite particles has been deduced. Particles have been formed and distinct, water-swelling, lipid domains have been confirmed by characterization by means of confocal laser scanning probe microscopy (CLSM). </p><p>The sample preparation process has been automated and a method based on using a robotic liquid handler has been developed. Phase diagrams have been determined by examination of macroscopic behaviours and the microstructures of the phases have been studied by small- and wide-angle X-ray scattering (L₃, V₂, L_α, L), nuclear magnetic resonance self-diffusion (L, L₃), viscosimetry (L) and rheology (L). Several different theoretical models have been applied for interpretation of the results. For example, the swelling of the reversed bicontinuous cubic phases and the sponge phase have been modelled by applying the theory of infinite periodical minimal surfaces, the sponge phase has been shown to be bicontinuous according to the theory of interconnected rods and the phase behaviour of the polymer has been described by the Flory-Huggins theory. The main focus of this work (4/5) concerns phase studies in multicomponent systems from a physical-chemical point of view.</p>

A new kind of lipid/polymer composite particle, consisting of a biodegradable polymer matrix with well-defined lipid domains, has been created. The lipid used is the water-swelling lipid monoolein (MO), which forms a reversed bicontinuous cubic diamond structure in aqueous solutions. The polymer is poly(d,l-lactide-co-glycolide) (PLG), which degrades into water-soluble monomers through hydrolysis. This new particle might be a good alternative for encapsulation of active substances intended to be released over a longer period of time, i.e. sustained/retained/controlled release. To prepare such particles can be difficult. Suitable phase behaviour and a solvent with the right properties are needed. For this reason, the phase behaviours of several different lipid/polymer/solvent/water systems have been explored. From the phase behaviour of a suitable system (i.e. MO/PLG/ethyl acetate/water), a route for formation of lipid/polymer composite particles has been deduced. Particles have been formed and distinct, water-swelling, lipid domains have been confirmed by characterization by means of confocal laser scanning probe microscopy (CLSM). The sample preparation process has been automated and a method based on using a robotic liquid handler has been developed. Phase diagrams have been determined by examination of macroscopic behaviours and the microstructures of the phases have been studied by small- and wide-angle X-ray scattering (L3, V2, Lα, L), nuclear magnetic resonance self-diffusion (L, L3), viscosimetry (L) and rheology (L). Several different theoretical models have been applied for interpretation of the results. For example, the swelling of the reversed bicontinuous cubic phases and the sponge phase have been modelled by applying the theory of infinite periodical minimal surfaces, the sponge phase has been shown to be bicontinuous according to the theory of interconnected rods and the phase behaviour of the polymer has been described by the Flory-Huggins theory. The main focus of this work (4/5) concerns phase studies in multicomponent systems from a physical-chemical point of view.